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Patent Application
Provisional
App. No. 61/444,651
· Confirmation No. 4207
Radical-assisted molecular layer deposition
Inventor:
Sang In Lee
Provisional Application Expired
No downloadable documents found — record may not be publicly available.
Inventors
Sang In Lee
Sunnyvale, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 758
- Docket No.
- 27276-18370
- Confirmation No.
- 4207
Child
PCT
Claims priority from a provisional application
→
PCT/US2012/025483
Filed 2012-02-16
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 13/397,590
· US 9,163,310
Filed 2012-02-15
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 14/855,195
Filed 2015-09-15
· Abandoned -- Failure to Respond to an Office Action
RELEASE OF SECURITY INTEREST
Recorded 2012-03-29
SECURITY AGREEMENT
Recorded 2011-09-29
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Quick Facts
- App. No.
- 61/444,651
- Filed
- 2011-02-18
External Links