IP Library › Patent Application 61548102
Patent Application Provisional
App. No. 61/548,102 · Confirmation No. 9261

Moving Mechanism for ALD Process Chamber

Inventor: Sang In Lee
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-08-31 TRAN.LET Transmittal Letter 1 View
2012-08-31 SPEC Specification 22 View
2012-08-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-10-28 APP.FILE.REC Filing Receipt 3 View
2011-10-28 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2011-10-17 SPECNO Specification - Not in English 22 View
2011-10-17 TR.PROV Provisional Cover Sheet (SB16) 3 View
2011-10-17 WFEE Fee Worksheet (SB06) 2 View
2011-10-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/548,102
Filed
2011-10-17