IP Library › Patent Application 61558124
Patent Application Provisional
App. No. 61/558,124 · Confirmation No. 8074

Structure of Atomic Layer Deposition (ALD) Apparatus

Inventor: Sang In Lee
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2011-12-01 APP.FILE.REC Filing Receipt 3 View
2011-11-10 TR.PROV Provisional Cover Sheet (SB16) 3 View
2011-11-10 SPEC Specification 25 View
2011-11-10 WFEE Fee Worksheet (SB06) 2 View
2011-11-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/558,124
Filed
2011-11-10