IP Library › Patent Application 61558132
Patent Application Provisional
App. No. 61/558,132 · Confirmation No. 7021

Securing of Shadow Mask on Susceptor for Atomic Layer Deposition

Inventor: Sang In Lee
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-11-09 APP.FILE.REC Filing Receipt 3 View
2012-11-06 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 2 View
2012-11-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-12-01 APP.FILE.REC Filing Receipt 3 View
2011-11-10 TR.PROV Provisional Cover Sheet (SB16) 3 View
2011-11-10 SPEC Specification 7 View
2011-11-10 WFEE Fee Worksheet (SB06) 2 View
2011-11-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
61/558,132
Filed
2011-11-10