IP Library › Patent Application 61593747
Patent Application Provisional
App. No. 61/593,747 · Confirmation No. 2508

Purge Mechanism for Shuttle with Wings for Performing Atomic Layer Deposition (ALD)

Inventor: Sang In Lee
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-02-14 APP.FILE.REC Filing Receipt 3 View
2012-02-01 SPEC Specification 11 View
2012-02-01 TR.PROV Provisional Cover Sheet (SB16) 3 View
2012-02-01 WFEE Fee Worksheet (SB06) 2 View
2012-02-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/593,747
Filed
2012-02-01