Patent Application
Provisional
App. No. 61/623,217
· Confirmation No. 1262
High Temperature Atomic Layer Deposition of Silicon Oxide Thin Films
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2012-05-23 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2012-04-12 | SPEC |
Specification | 10 | View | |
| 2012-04-12 | CLM |
Claims | 10 | View | |
| 2012-04-12 | ABST |
Abstract | 1 | View | |
| 2012-04-12 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2012-04-12 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2012-04-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-04-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Manchao Xiao
San Diego, CA
Haripin Chandra
Carlsbad, CA
Xinjian Lei
Vista, CA
Ronald Martin Pearlstein
San Marcos, CA
Mark Leonard O'Neill
San Marcos, CA
Agnes Derecskei-Kovacs
Macungie, PA
Bing Han
Beijing, CHINA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07569Z USA
- Confirmation No.
- 1262
Child
Claims priority from a provisional application
→
App. 15/248,214
· US 10,242,864
Filed 2016-08-26
· Patented Case
Child
Claims priority from a provisional application
→
App. 13/857,507
· US 9,460,912
Filed 2013-04-05
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/255,464
· US 10,991,571
Filed 2019-01-23
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 61/623,217
- Filed
- 2012-04-12
External Links