IP Library › Patent Application 61732900
Patent Application Provisional
App. No. 61/732,900 · Confirmation No. 4963

SILICON PRECURSORS FOR LOW TEMPERATURE ALD OF SILICON-BASED THIN-FILMS

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-01-02 APP.FILE.REC Filing Receipt 3 View
2012-12-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
2012-12-03 SPEC Specification 15 View
2012-12-03 CLM Claims 6 View
2012-12-03 ABST Abstract 1 View
2012-12-03 DRW.NONBW Drawings-other than black and white line drawings 2 View
2012-12-03 TR.PROV Provisional Cover Sheet (SB16) 3 View
2012-12-03 ADS Application Data Sheet 6 View
2012-12-03 WFEE Fee Worksheet (SB06) 2 View
2012-12-03 N417 Electronic Filing System Acknowledgment Receipt 3 View
2012-12-03 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
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Quick Facts
App. No.
61/732,900
Filed
2012-12-03