IP Library › Patent Application 61747686
Patent Application Provisional Small
App. No. 61/747,686 · Confirmation No. 2535

SYSTEMS AND METHODS FOR HANDLING WAFERS AT BELOW DEW POINT TEMPERATURES

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-01-14 APP.FILE.REC Filing Receipt 3 View
2012-12-31 TR.PROV Provisional Cover Sheet (SB16) 2 View
2012-12-31 ADS Application Data Sheet 5 View
2012-12-31 SPEC Specification 26 View
2012-12-31 ABST Abstract 1 View
2012-12-31 DRW Drawings-only black and white line drawings 3 View
2012-12-31 WFEE Fee Worksheet (SB06) 2 View
2012-12-31 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/747,686
Filed
2012-12-31