IP Library › Patent Application 61747703
Patent Application Provisional Small
App. No. 61/747,703 · Confirmation No. 1000

SYSTEMS AND METHODS FOR PROVIDING WAFER ACCESS IN A WAFER PROCESSING SYSTEM

Inventor: Frank Fehrmann
Provisional Application Expired
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 Code Description Pages PDF
2014-01-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-01-16 PA.. Power of Attorney 1 View
2014-01-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-01-16 REF.OTHER Other reference-Patent/Application/Search Documents 1 View
2014-01-16 WFEE Fee Worksheet (SB06) 2 View
2014-01-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-01-16 R48.REQ Request under Rule 48 correcting inventorship 2 View
2013-01-17 APP.FILE.REC Filing Receipt 3 View
2012-12-31 TR.PROV Provisional Cover Sheet (SB16) 2 View
2012-12-31 ADS Application Data Sheet 5 View
2012-12-31 SPEC Specification 27 View
2012-12-31 ABST Abstract 1 View
2012-12-31 DRW Drawings-only black and white line drawings 4 View
2012-12-31 WFEE Fee Worksheet (SB06) 2 View
2012-12-31 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/747,703
Filed
2012-12-31