IP Library › Patent Application 61835436
Patent Application Provisional
App. No. 61/835,436 · Confirmation No. 1217

Atomic Layer Deposition Using Precursor Injectors Movable within Chamber Filled with Precursor Material

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2014-05-13 TRAN.LET Transmittal Letter 1 View
2014-05-13 SPEC Specification 23 View
2014-05-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-06-25 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2013-06-25 APP.FILE.REC Filing Receipt 3 View
2013-06-14 TR.PROV Provisional Cover Sheet (SB16) 3 View
2013-06-14 SPECNO Specification - Not in English 23 View
2013-06-14 WFEE Fee Worksheet (SB06) 2 View
2013-06-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/835,436
Filed
2013-06-14