Patent Application
Provisional
App. No. 61/903,491
· Confirmation No. 2427
ALD PROCESSES FOR LOW LEAKAGE CURRENT AND LOW EQUIVALENT OXIDE THICKNESS BiTaO FILMS
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-03-10 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2014-02-25 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2013-11-13 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2013-11-13 | SPEC |
Specification | 30 | View | |
| 2013-11-13 | CLM |
Claims | 12 | View | |
| 2013-11-13 | ABST |
Abstract | 1 | View | |
| 2013-11-13 | DRW.NONBW |
Drawings-other than black and white line drawings | 10 | View | |
| 2013-11-13 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-11-13 | ADS |
Application Data Sheet | 7 | View | |
| 2013-11-13 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-11-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2013-11-13 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View |
Inventors
Bryan C. Hendrix
Danbury, CT
Philip S.H. Chen
Bethel, CT
Weimin Li
New Milford, CT
Woosung Jang
Gyeong Gi-Do, KOREA, REPUBLIC OF
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23448
- Docket No.
- 2771-1135-PRV3
- Confirmation No.
- 2427
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-04
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-12-13
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Quick Facts
- App. No.
- 61/903,491
- Filed
- 2013-11-13
External Links