Patent Application
Provisional
App. No. 61/935,798
· Confirmation No. 6188
SELECTIVE DEPOSITION OF METALS ON METALS AND DIELECTRICS ON DIELECTRICS
Inventors:
Suvi P. Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari, Viljami J. Pore, Ivo Raaijmakers
Applicant:
ASM IP Holding B.V.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-11-02 | OATH |
Oath or Declaration filed | 12 | View | |
| 2014-03-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2014-02-07 | ADS |
Application Data Sheet | 6 | View | |
| 2014-02-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-02-04 | ADS |
Application Data Sheet | 9 | View | |
| 2014-02-04 | SPEC |
Specification | 12 | View | |
| 2014-02-04 | CLM |
Claims | 4 | View | |
| 2014-02-04 | APPENDIX |
Appendix to the specification | 211 | View | |
| 2014-02-04 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-02-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Suvi P. Haukka
Helsinki, FINLAND
Raija H. Matero
Helsinki, FINLAND
Eva Tois
Helsinki, FINLAND
Antti Niskanen
Helsinki, FINLAND
Marko Tuominen
Helsinki, FINLAND
Hannu Huotari
Helsinki, FINLAND
Viljami J. Pore
Helsinki, FINLAND
Ivo Raaijmakers
Bilthoven, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 20995
- Docket No.
- ASMMC.109PRF
- Confirmation No.
- 6188
Child
Claims priority from a provisional application
→
App. 14/612,784
· US 9,895,715
Filed 2015-02-03
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/877,632
· US 10,456,808
Filed 2018-01-23
· Patented Case
Child
Claims priority from a provisional application
→
App. 17/547,083
· US 11,975,357
Filed 2021-12-09
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/657,307
· US 11,213,853
Filed 2019-10-18
· Patented Case
from
RAAIJMAKERS, IVO,
HAUKKA, SUVI P.,
HUOTARI, HANNU,
NISKANEN, ANTTI,
TOIS, EVA,
MATERO, RAIJA H.,
PORE, VILJAMI J.,
TUOMINEN, MARKO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-11-02
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Quick Facts
- App. No.
- 61/935,798
- Filed
- 2014-02-04
External Links