IP Library Patent Application 61969322
Patent Application Provisional
App. No. 61/969,322 · Confirmation No. 4384

ELECTRICAL CHARGE REGULATION FOR A SEMICONDUCTOR SUBSTRATE DURING CHARGED PARTICLE BEAM PROCESSING

Provisional Application Expired
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Code Description Pages PDF
2014-04-21 APP.FILE.REC Filing Receipt 3 View
2014-03-24 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 2 View
2014-03-24 WFEE Fee Worksheet (SB06) 2 View
2014-03-24 N417 Electronic Filing System Acknowledgment Receipt 3 View
2014-03-24 ADS Application Data Sheet 7 View
2014-03-24 SPEC Specification 13 View
2014-03-24 CLM Claims 3 View
2014-03-24 ABST Abstract 1 View
2014-03-24 DRW Drawings-only black and white line drawings 7 View
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Quick Facts
App. No.
61/969,322
Filed
2014-03-24