IP Library › Patent Application 62222724
Patent Application Provisional
App. No. 62/222,724 · Confirmation No. 4199

Amplitude and Phase Control in Overlay Measurement

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2015-10-08 APP.FILE.REC Filing Receipt 3 View
2015-09-23 TR.PROV Provisional Cover Sheet (SB16) 3 View
2015-09-23 SPEC Specification 12 View
2015-09-23 WFEE Fee Worksheet (SB06) 2 View
2015-09-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/222,724
Filed
2015-09-23