Patent Assignment
Reel/Frame 039905/0325
Assignment of Assignor's Interest
Recorded: 2016-09-30
Pages: 7
Assignors
LEVINSKI, VLADIMIR
Executed: 2016-06-20
PASKOVER, YURI
Executed: 2016-09-28
MANASSEN, AMNON
Executed: 2016-09-22
SHALIBO, YONI
Executed: 2016-07-15
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(3)
Topographic Phase Control for Overlay Measurement
Approach for Imaging OVL Measurement
Application:
62/163,783 →
Amplitude and Phase Control in Overlay Measurement
Application:
62/222,724 →