IP Library › Patent Application 62650832
Patent Application Provisional
App. No. 62/650,832 · Confirmation No. 8400

IN-SITU WAFER TEMPERATURE MEASUREMENT AND CONTROL

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2018-04-05 APP.FILE.REC Filing Receipt 3 View
2018-03-30 TR.PROV Provisional Cover Sheet (SB16) 3 View
2018-03-30 ADS Application Data Sheet 9 View
2018-03-30 ABST Abstract 1 View
2018-03-30 CLM Claims 16 View
2018-03-30 SPEC Specification 21 View
2018-03-30 DRW Drawings-only black and white line drawings 7 View
2018-03-30 WFEE Fee Worksheet (SB06) 2 View
2018-03-30 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/650,832
Filed
2018-03-30