IP Library › Patent Application 62675641
Patent Application Provisional
App. No. 62/675,641 · Confirmation No. 1528

Performance Monitoring of Design Based Alignment

Inventor: Bjorn Brauer
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2018-05-29 APP.FILE.REC Filing Receipt 3 View
2018-05-23 TR.PROV Provisional Cover Sheet (SB16) 3 View
2018-05-23 SPEC Specification 8 View
2018-05-23 WFEE Fee Worksheet (SB06) 2 View
2018-05-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/675,641
Filed
2018-05-23