Patent Application
Provisional
App. No. 62/687,192
· Confirmation No. 2201
Method of Correlating SEM and Optical Images for Wafer Noise Nuisance Identification
Provisional Application Expired
Inventors
Qiang Zhang
Fremont, CA
Grace H. Chen
Los Gatos, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P5343
- Confirmation No.
- 2201
Child
Claims priority from a provisional application
→
App. 16/394,723
· US 10,697,900
Filed 2019-04-25
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/886,255
· US 10,921,262
Filed 2020-05-28
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2019/036872
Filed 2019-06-13
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-04-25
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Quick Facts
- App. No.
- 62/687,192
- Filed
- 2018-06-19
External Links