Patent Application
Provisional
App. No. 62/879,720
· Confirmation No. 6195
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR CLEANING THE SAME
Applicant:
Applied Materials, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-08-07 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-07-29 | SPEC |
Specification | 28 | View | |
| 2019-07-29 | CLM |
Claims | 5 | View | |
| 2019-07-29 | ABST |
Abstract | 1 | View | |
| 2019-07-29 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2019-07-29 | ADS |
Application Data Sheet | 10 | View | |
| 2019-07-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-07-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Nitin Pathak
Mumbai, INDIA
Yuxing Zhang
San Jose, CA
Tuan A. Nguyen
San Jose, CA
Kalyanjit Ghosh
Pleasaston, CA
Amit Bansal
Milpitas, CA
Juan C. Rocha
San Carlos, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 57385
- Docket No.
- 80042-44016476US1-1137605
- Confirmation No.
- 6195
Child
Claims priority from a provisional application
→
App. 18/626,047
· US 12,630,920
Filed 2024-04-03
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2020/043197
Filed 2020-07-23
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 16/936,110
· US 11,952,660
Filed 2020-07-22
· Patented Case
from
BANSAL, AMIT,
ZHANG, YUXING,
PATHAK, NITIN,
ROCHA-ALVAREZ, JUAN CARLOS,
NGUYEN, TUAN A.,
GHOSH, KALYANJIT
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-02-04
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Quick Facts
- App. No.
- 62/879,720
- Filed
- 2019-07-29
External Links