IP Library › Patent Application 63200387
Patent Application Provisional
App. No. 63/200,387 · Confirmation No. 9913

DOUBLE PATTERNING TECHNIQUES FOR FORMING A DEEP TRENCH ISOLATION STRUCTURE

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2021-06-01 OATH Oath or Declaration filed 4 View
2021-04-30 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2021-04-27 PA.. Power of Attorney 2 View
2021-04-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2021-03-10 APP.FILE.REC Filing Receipt 3 View
2021-03-04 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-03-04 N417.PYMT Electronic Fee Payment 2 View
2021-03-04 ADS Application Data Sheet 10 View
2021-03-04 SPEC Specification 5 View
2021-03-04 CLM Claims 4 View
2021-03-04 TRAN.LET Transmittal Letter 1 View
2021-03-04 APPENDIX Appendix to the specification 9 View
2021-03-04 SPEC Specification — View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
63/200,387
Filed
2021-03-04