IP Library › Patent Application 63350868
Patent Application Provisional
App. No. 63/350,868 · Confirmation No. 8803

Rotating target for EIV source with liquid metal.

Applicant: KLA CORPORATION
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2022-06-15 APP.FILE.REC Filing Receipt 3 View
2022-06-10 ADS Application Data Sheet 8 View
2022-06-10 SPEC Specification 9 View
2022-06-10 WFEE Fee Worksheet (SB06) 2 View
2022-06-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
63/350,868
Filed
2022-06-10