Patent Assignment
Reel/Frame 062247/0197
Assignment of Assignor's Interest
Recorded: 2022-12-30
Pages: 4
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Rotating Target for Extreme Ultraviolet Source with Liquid Metal
Rotating target for EIV source with liquid metal.
Application:
63/350,868 →