Patent Application
Re-Examination
App. No. 90/007,367
· Confirmation No. 2835
PLASMA ASHING PROCESS
Reexamination Certificate Issued
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-04-01 | RXCERT |
Reexamination Certificate Issued | 3 | View | |
| 2007-12-06 | RXNIRC |
Notice of Intent to Issue a Reexam Certificate | 13 | View | |
| 2007-12-06 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2007-12-06 | RXFILJKT |
Paper Reexam File Jacket is scanned | 1 | View | |
| 2007-12-06 | FWCLM |
Index of Claims | 2 | View | |
| 2007-12-06 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2007-11-14 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2007-11-14 | A.NE |
Response After Final Action | 1 | View | |
| 2007-11-08 | CLM |
Claims | 11 | View | |
| 2007-11-05 | SAFR |
Supplemental Amendment after Final Rejection | 3 | View | |
| 2007-11-05 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2007-10-15 | RXAAF. |
Reexam Response to Final Rejection | 3 | View | |
| 2007-10-15 | CLM |
Claims | 9 | View | |
| 2007-10-15 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2007-10-15 | RXC/SR |
Reexam Certificate of Service | 1 | View | |
| 2007-08-09 | RXFR.. |
Reexam - Final Rejection | 26 | View | |
| 2007-08-09 | RXFILJKT |
Paper Reexam File Jacket is scanned | 2 | View | |
| 2007-07-25 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2007-07-25 | CLM |
Claims | 9 | View | |
| 2007-07-25 | REM |
Applicant Arguments/Remarks Made in an Amendment | 10 | View | |
| 2007-07-25 | RXC/SR |
Reexam Certificate of Service | 1 | View | |
| 2007-07-25 | AF/D |
Affidavit-submitted prior to Mar 15, 2013 | 5 | View | |
| 2007-05-21 | RXR.NF |
Reexam - Non-Final Action | 20 | View | |
| 2007-05-21 | 892 |
List of references cited by examiner | 1 | View | |
| 2007-05-21 | RXFILJKT |
Paper Reexam File Jacket is scanned | 1 | View | |
| 2007-05-21 | FWCLM |
Index of Claims | 2 | View | |
| 2007-05-21 | SRFW |
Search information including classification, databases and other search related notes | 4 | View | |
| 2007-05-07 | RXAAF. |
Reexam Response to Final Rejection | 2 | View | |
| 2007-05-07 | CLM |
Claims | 9 | View | |
| 2007-05-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 23 | View | |
| 2007-05-07 | RXC/SR |
Reexam Certificate of Service | 1 | View | |
| 2007-04-12 | RXAAF. |
Reexam Response to Final Rejection | 2 | View | |
| 2007-04-12 | CLM |
Claims | 9 | View | |
| 2007-04-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 24 | View | |
| 2007-03-23 | RXADV. |
Reexam proceeding - Advisory Action | 5 | View | |
| 2007-02-12 | A.NE |
Response After Final Action | 2 | View | |
| 2007-02-12 | CLM |
Claims | 8 | View | |
| 2007-02-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 23 | View | |
| 2007-02-12 | RXC/SR |
Reexam Certificate of Service | 1 | View | |
| 2007-02-12 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2006-12-08 | RXFR.. |
Reexam - Final Rejection | 24 | View | |
| 2006-12-08 | FWCLM |
Index of Claims | 2 | View | |
| 2006-05-22 | A.I. |
Informal or Non-Responsive Amendment | 2 | View | |
| 2006-05-22 | CLM |
Claims | 9 | View | |
| 2006-05-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 15 | View | |
| 2006-05-22 | RXC/SR |
Reexam Certificate of Service | 1 | View | |
| 2006-04-19 | RXNINA |
Notification of Informal or Nonresponsive Amendment | 4 | View | |
| 2006-04-19 | RXFILJKT |
Paper Reexam File Jacket is scanned | 1 | View | |
| 2006-02-09 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2006-02-09 | CLM |
Claims | 9 | View | |
| 2006-02-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 12 | View | |
| 2006-02-09 | RXC/SR |
Reexam Certificate of Service | 2 | View | |
| 2005-12-09 | RXR.NF |
Reexam - Non-Final Action | 14 | View | |
| 2005-12-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2005-12-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2005-12-09 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2005-12-09 | FWCLM |
Index of Claims | 1 | View | |
| 2005-12-09 | SRFW |
Search information including classification, databases and other search related notes | 4 | View | |
| 2005-02-09 | RXREXO |
Determination -- Reexam Ordered | 5 | View | |
| 2005-02-09 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2005-01-27 | RXLITSR |
Reexam Litigation Search Conducted | 15 | View | |
| 2005-01-18 | RXTTLRPT |
Title Report | 1 | View | |
| 2005-01-18 | RXNREQFD |
Notice of reexamination request filing date | 1 | View | |
| 2005-01-18 | RXNREQAU |
Notice of Assignment of Reexamination Request | 1 | View | |
| 2005-01-07 | RXOSUB.R |
Receipt of Original Ex Parte Request by Third Party | 25 | View | |
| 2005-01-07 | RXPATENT |
Copy of patent for which reexamination is requested | 11 | View | |
| 2005-01-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2005-01-07 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2005-01-07 | RXFILJKT |
Paper Reexam File Jacket is scanned | 5 | View |
Inventors
Axcelis Technologies(Owner)
Beverly, MA
Michael Pritzkau Patent Group(3rd. Pty. Req.)
Boulder, CO
Jay R Beyer
Boulder, CO
Attorneys & Agents of Record
Classification
USPC
438/710
Prosecution
- Examiner
- KIELIN, ERIK J
- Art Unit
- 2814
- Customer No.
- 23413
- Docket No.
- MAT-AXRR
- Confirmation No.
- 2835
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Quick Facts
- App. No.
- 90/007,367
- Filed
- 2005-01-07
- Examiner
- KIELIN, ERIK J
- Art Unit
- 2814
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