Optical substrate having alignment fiducials
A process comprising: (a) applying a stop etch mask to a substrate, the mask defining the location on the substrate of a groove for receiving a waveguide and one or more fiducials for positioning the optical device on the substrate relative to the waveguide; and (b) etching the substrate to define the fiducials and the groove, the groove being dimensioned to receive at least a portion of a waveguide and the fiducials enabling the optical device to be positioned on the substrate such that it is optically aligned with the waveguide.
1. A process for preparing a substrate having alignment features to facilitate passively mounting components on said substrate having an x, y, z, orientation and a substrate surface along an xz plane, said substrate having a specific point thereon , said process comprising:
applying a stop etch mask to said substrate, said mask defining the location on said substrate of one or more fiducials for positioning a device on said substrate relative to said specific point; and
etching said substrate to define said fiducials using an inductively coupled plasma etching process, at least one of said fiducials comprising a planar surface substantially perpendicular to said substrate surface, said planar surface being adapted to act as a register surface to enable said device to be positioned on said substrate such that it is in a precise position relative to said specific point.
2. The process of claim 1 , wherein said inductively coupled plasma etching process is a Bosch process.
3. The process of claim 1 , wherein said device is an optical device and wherein said mask also defines the location on said substrate of a groove for receiving said waveguide, and wherein said grove is also etched using an inductively coupled plasma etching process.
4. The process of claim 3 , wherein said groove is deeper than 13 μm from said substrate surface.
5. The process of claim 4 , wherein said groove is a U-groove.
6. The process of claim 5 , wherein said U-groove has a bottom at about 60 to about 65 μm from said substrate surface.
7. The process of claim 6 , wherein etching said U-groove comprises etching a U-groove terrace, said U-groove and U-groove terrace defining edges for receiving a waveguide.
8. The process of claim 3 , wherein a first fiducial defines a first register surface a first certain distance from said substrate surface alone said y-axis, a second fiducial defines a second register surface a second certain distance from said specific point along said x-axis, a third fiducial defines a third resister surface a third certain distance from said specific point alone said z-axis, and wherein said groove, and said first, second and third fiducials are located on said substrate using the same mask, and wherein a mechanical stop has a fourth register surface a fourth certain distance from said specific point along said z-axis, said mechanical stop being adjacent to said groove and adapted to contact a waveguide in said groove to position it from said specific point along the z-axis.
9. The process of claim 3 , wherein a mechanical stop has a fourth register surface a fourth certain distance from said specific point along said z-axis, said mechanical stop being adjacent to said groove and adapted to contact a waveguide in said groove to position said waveguide from said specific point along the z-axis.
10. The process of claim 3 , wherein said waveguide is a fiber.
11. The process of claim 3 , wherein, when said optical device is in said precise position, it is optically aligned with said wave guide.
12. The process of claim 1 , wherein said substrate is form from a materials selected from the group consisting of polycrystalline silicon, silica, and ceramics.
13. The process of claim 1 , further comprising etching an etched field encompassing said fiducials.
14. The process of claim 1 , wherein a first fiducial defines a first register surface a first certain distance from said substrate surface along said y-axis, a second fiducial defines a second register surface a second certain distance from said specific point along said x-axis, a third fiducial defines a third register surface a third certain distance from said specific point along said z-axis, and wherein said groove, and said first, second and third fiducials are located on said substrate using the same mask.
15. The process of claim 1 , further comprising disposing an optical device on said substrate in a certain position relation with respect to said fiducials.
16. The process of claim 15 , wherein optical device is disposed on said substrate by visually aligning said optical device to said fiducials.
17. The process of claim 15 , wherein said optical device is disposed on said substrate by physically contacting said optical device with said fiducials.
18. The process of claim 15 , wherein further comprising disposing a waveguide in said groove.
19. The process of claim 1 , wherein the tolerance of the alignment of said groove to said fiducials is less than ±0.2 μm.
20. The process of claim 1 , wherein said optical device is at least one of a laser, photodetector, or monitor.
21. The process of claim 1 , further comprising:
effecting the positioning of said device against said register surface.
22. The process of claim 21 , wherein said device is within ±0.2 μm of said precise position.