Micro-fluidic manufacturing method for forming a color filter
A micro-fluidic manufacturing method of forming a color filter. First, a transparent substrate is provided with a plurality of black matrixes. Then, a plurality of ribs are formed on the black matrixes respectively, wherein the width of the rib is not larger than the width of the black matrix. Next, a plurality of micro fluids is injected within a plurality of predetermined areas separated by the ribs, wherein the micro fluids within each predetermined area are mixed to serve as an ink. Next, each ink within each predetermined area is dried to form a plurality of color layers of different colors. Finally, after removing the ribs, a transparent conductive layer is formed on the transparent substrate to cover the black matrixes and the color layers.
1. A micro-fluidic manufacturing method of forming a color filter, comprising steps of:
providing a transparent substrate with a plurality of black matrixes;
forming a photoresist layer on the transparent substrate to cover the black matrix; and using lithography to pattern the photoresist layer as a plurality of strips of high-wall ribs and forming a plurality of ribs on the black matrixes respectively, wherein the width of the rib is not larger than the width of the black matrix, and wherein during lithography, the photoresist layer is patterned as a plurality of connecting ribs for connecting the strips of high-wall ribs, in which the height of the connecting rib is less than the height of the high-wall rib, and the width of the connecting rib is not larger than the width of the black matrix;
injecting a plurality of micro fluids into a plurality of predetermined areas separated by the ribs, wherein the micro fluids within each predetermined area are driven and mixed by surface tension of fluids to serve as an ink;
drying each ink within each predetermined area to form a plurality of color layers of different colors;
removing the high-wall ribs and connecting ribs; and
forming a transparent conductive layer on the transparent substrate to cover the black matrixes and the color layers.
2. The method according to claim 1 , wherein during injection of micro fluids, a micro-fluidic jetting device is employed.
3. The method according to claim 2 , wherein the micro-fluidic jetting device is a thermal bubble ink jet printing apparatus or a piezoelectric ink jet printing apparatus.
4. The method according to claim 1 , wherein during drying of the ink, a heating device is employed.
5. The method according to claim 4 , wherein the heating device is a luminescent device.
6. The method according to claim 1 , wherein the photoresist layer is formed on the transparent substrate by a dry film method.
7. The method according to claim 1 , wherein the photoresist layer is formed on the transparent substrate by spin coating.
8. The method according to claim 1 , wherein the transparent conductive layer is an ITO film.
9. A micro-fluidic manufacturing method of forming a color filter, comprising steps of:
a providing a transparent substrate with a plurality of black matrixes;
forming a plurality of high-wall ribs and connecting ribs for connecting the high-wall ribs on the black matrixes respectively, wherein the width of the high-wall rib is not larger than the width of the black matrix, the width of the connecting rib is not larger than the width of the black matrix, and the height of the connecting rib is less than the height of the high-wall rib;
injecting a plurality of micro fluids of a predetermined color into a plurality of predetermined areas separated by the high-wall ribs and connecting ribs, wherein the micro fluids within each predetermined area are mixed to serve as an ink;
drying each ink within each predetermined area to form a plurality of color layers of different colors;
removing the high-wall ribs and connecting ribs; and
forming a transparent conductive layer on the transparent substrate to cover the black matrixes and the color layers.
10. The method according to claim 9 , wherein the step of forming the high-wall ribs and connecting ribs comprises steps of:
forming a photoresist layer on the transparent substrate to cover the black matrixes; and
using lithography to pattern the photoresist layer as the high-wall ribs and connecting ribs.
11. The method according to claim 10 , wherein the photoresist layer is formed on the transparent substrate by a dry film method.
12. The method according to claim 10 , wherein the photoresist layer is formed on the transparent substrate by spin coating.
13. The method according to claim 9 , wherein during injection of micro fluids, a micro-fluidic jetting device is employed.
14. The method according to claim 13 , wherein the micro-fluidic jetting device is a thermal bubble ink jet printing apparatus or a piezoelectric ink jet printing apparatus.
15. The method according to claim 9 , wherein during drying of the ink, a heating device is employed.
16. The method according to claim 15 , wherein the heating device is a luminescent device.
17. The method according to claim 9 , wherein the transparent conductive layer is an ITO film.