IP Library › Granted Patent US 6,854,193
Granted Patent B2
US 6,854,193 · App. 10/400,799 · Granted Feb 15, 2005

Rotating swivel unit for sensors of a coordinate measuring apparatus and method for determining corrective parameters of the rotating swivel unit

Assignee: Carl-Zeiss-Stiftung
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Quick Facts
Patent No.
US 6,854,193
App. No.
10/400,799
Granted
Feb 15, 2005
Kind
B2
Abstract

The invention relates to the determination of correction parameters of a rotating swivel unit. An optical sensor ( 9 ) measuring in at least one dimension is fixed to the unit. The sensor is calibrated on a calibration body in at least three rotational positions of a rotating joint of the rotating swivel unit. At least parameters of a first parameter field are calculated, the field describing the transformation (rotation) of a sensor coordinate system (u,v,w) in the machine coordinate system (X M , Y M , Z M ) , and parameters of another parameter field are determined, the other field describing the shift (vector) of the sensor coordinate system in relation to the point (AB) (in the measuring arm) in the machine coordinate system.

Claims (67)

1. A method for determining corrective parameters of a rotating swivel unit to which a sensor of a coordinating measuring apparatus is attached with said sensor measuring in at least one dimension, the rotating swivel unit having a swivel joint and the method comprising the steps of:

carrying out a calibration of said sensor for at least three rotational positions of said swivel joint;

computing at least parameters of a first parameter field (M S ) for each of said rotational positions with said first parameter field (M S ) describing the transformation of a sensor coordinate system (u,v,w) into a machine coordinate system (X M , Y M , Z M ) of the coordinate measuring apparatus;

computing parameters of a second parameter field (p s ) describing an offset of said sensor coordinate system (u,v,w) with respect to a point (AB) in said machine coordinate system (X M , Y M , Z M ); and,

determining corrective parameters of said swivel joint from said parameters of said first and second parameter fields.

2. The method of claim 1 , wherein said corrective parameters include at least one of the following: position of the rotational axes to each other, angular position deviations and course deviations.

3. The method of claim 1 , wherein a rotational axis (a a ) of said swivel joint is vertically aligned during the calibration of said sensor.

4. The method of claim 1 , wherein measurement values are measured during the calibration which are substantially uniformly distributed over the measuring range of said sensor.

5. The method of claim 1 , wherein said sensor is connected directly to said swivel joint and the corrective parameters are determined only for said swivel joint.

6. The method of claim 1 , comprising the further steps of:

providing a calibration sphere having a known radius (r K ) in the measuring space of said coordinate measuring apparatus and determining the center point (p K ) of said calibration sphere in said machine coordinate system (X M , Y M , Z M );

measuring points (p o,i ) on the surface of said calibration sphere utilizing said sensor to be calibrated;

recording measured values (s′ i ) over wide regions of said measuring ranges; and,

determining said parameters of said first parameter field (M S ) and said second parameter field (p S ) for said sensor from said measured values (s′ i ) while considering that said center point (p k ) and said radius (r K ) of said calibration sphere are known.

7. The method of claim 6 , comprising the further step of determining the parameters of said parameter fields (M S , p S ) while using the following relationship:

|p o,i −p K |=r K

wherein:

p o,i is a measuring point on the surface of the calibration sphere;

p K is the center point of the calibration sphere;

r K is the radius of the calibration sphere; and,

wherein, in the relationship, the center point (p K ) of the calibration sphere and the radius of the calibration sphere are known.

8. The method of claim 7 , wherein the parameters of said parameter fields (M S , p S ) are determined via the following relationship:

|p M +p S +M S s′−p K |=r K

wherein:

p K is a vector to the center point of the calibration sphere in said machine coordinate system;

r K is the radius of said calibration sphere;

p M is a vector from the origin of the machine coordinate system (X M , Y M , Z M ) to said point (AB) in the measuring arm of said coordinate measuring apparatus with said sensor being attached to said measuring arm;

p S is a vector from point (AB) in said measuring arm to said origin of said sensor coordinate system (u,v,w);

s′ is a vector of a measuring point on the surface of said calibration sphere with said measuring point being measured in said sensor coordinate system (u,v,w); and,

M S is said first parameter field (sensor matrix).

9. A rotating swivel unit for a sensor of coordinate measuring apparatus, the sensor measuring in at least one dimension and the rotating swivel unit comprising:

at least two swivel joints for aligning the sensor with respect to angle;

a corrective unit for correcting the measured values of the sensor, when measuring, in correspondence to the rotational position of said swivel joints;

means for picking up corrective values which include functioning to:

carry out a calibration of said sensor for at least three rotational positions of one of said swivel joints with said sensor measuring in at least one dimension;

compute at least parameters of a first parameter field (M S ) for each of said rotational positions with said first parameter field (M S ) describing the transformation of a sensor coordinate system (u,v,w) into a machine coordinate system (X M , Y M , Z M ) of the coordinate measuring apparatus;

compute parameters of a second parameter field (p s ) describing an offset of said sensor coordinate system (u,v,w) with respect to a point (AB) in said machine coordinate system (X M , Y M , Z M ); and,

determine corrective parameters of said swivel joint from said parameters of said first and second parameter fields.

10. The rotating swivel unit of claim 9 , wherein said corrective parameters include at least one of the following: position of the rotational axes to each other, angular position deviations and course deviations.

11. The rotating swivel unit of claim 9 , wherein a rotational axis (a a ) of said swivel joint is vertically aligned during the calibration of said sensor.

12. The rotating swivel unit of claim 9 , wherein measurement values are measured during the calibration which are substantially uniformly distributed over the measuring range of said sensor.

13. The rotating swivel unit of claim 9 , wherein said sensor is a two-dimensional measuring optical probe.

14. The rotating swivel unit of claim 9 , wherein the pick up of corrective parameters for different angular positions of the swivel joints is carried out.

15. The rotating swivel unit of claim 9 , wherein said three rotational positions of said swivel joint are distributed substantially uniformly over the rotational range of said swivel joint.

16. The rotating swivel unit of claim 9 , wherein said corrective unit functions to carry out the calibration of said sensor by performing the method steps of:

providing a calibration sphere having a known radius (r K );

determining the center point (p K ) of a calibration sphere in said machine coordinate system (X M , Y M , Z M );

measuring points (p o,i ) on the surface of said calibration sphere utilizing said sensor to be calibrated;

recording measured values (s′ i ) over wide regions of said measuring ranges; and,

determining said parameters of said first parameter field (M S ) and said second parameter field (p S ) for said sensor from said measured values (s′ i ) while considering that said center point (p K ) and said radius (r K ) of said calibration sphere are known.

17. The rotating swivel unit of claim 16 , wherein the corrective unit determines the parameters of said parameter field (M S ) while using the following relationship:

|p o,i −p K |=r K

wherein:

p o,i is a measuring point on the surface of the calibration sphere;

p K is the center point of the calibration sphere;

r K is the radius of the calibration sphere; and,

wherein, in the relationship, the center point (p K ) of the calibration sphere and the radius of the calibration sphere are known.

18. The rotating swivel unit of claim 17 , wherein the corrective unit determines the parameters of said parameter field (M S ) via the following relationship:

| p M +p S +M S s′−p K |=r K

wherein:

p K is a vector to the center point of the calibration sphere in said machine coordinate system;

r K is the radius of said calibration sphere;

p M is a vector from the origin of the machine coordinate system (X M , Y M , Z M ) to said point (AB) in the measuring arm of said coordinate measuring apparatus with said sensor being attached to said measuring arm;

p S is a vector from point (AB) in said measuring arm to said origin of said sensor coordinate system (u,v,w);

s′ is a vector of a measuring point on the surface of said calibration sphere with said measuring point being measured in said sensor coordinate system (u,v,w); and,

M S is said first parameter field (sensor matrix).

19. The rotating swivel unit of claim 9 , wherein said sensor is attached to said rotating swivel unit so as to be exchangeable.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2004
From: STIFTUNG, CARL ZEISS
To: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
Reel/Frame 015529/0417 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 10, 2003
From: LOTZE, WERNER
To: CARL-ZEISS-STIFTUNG HEIDENHEIM/BRENZ
Reel/Frame 014251/0658 →
Priority Claims (2)
DE 100 48 096 · Sep 28, 2000 · national
DE 100 48 095 · Sep 28, 2000 · national
Continuity (2)
Continuation PCTEP011006600 · Aug 31, 2001
Related Publication 20030233760A1 · Dec 25, 2003