Monodisperse spherical metal particles and manufacturing method therefor
It is an object of the present invention to provide spherical metal particles having excellent monodispersity. The present invention relates to a method of manufacturing monodisperse spherical metal particles characterized by passing liquid metal through a porous membrane so as to disperse the resulting liquid metal particles in a continuous liquid phase.
1. Monodisperse spherical metal particles having a cumulative volume distribution satisfying the following conditions as prepared:
(a) a particle diameter corresponding to 50 vol % in the distribution is 10 μm or smaller;
(b) a particle diameter corresponding to 10 vol % in the distribution is at least 60% of the particle diameter corresponding to 50 vol % in the distribution; and
(c) a particle diameter corresponding to 90 vol % in the distribution is at most 125% of the particle diameter corresponding to 50 vol % in the distribution, wherein the metal particles have a mean aspect ratio of 1.1 or less.
2. Monodisperse spherical metal particles having a cumulative volume distribution satisfying the following conditions as prepared:
(a) a particle diameter corresponding to 50 vol % in the distribution is 10 μm or smaller;
(b) a particle diameter corresponding to 10 vol % in the distribution is at least 60% of the particle diameter corresponding to 50 vol % in the distribution; and
(c) a particle diameter corresponding to 90 vol % in the distribution is at most 125% of the particle diameter corresponding to 50 vol % in the distribution, wherein the metal particles are made of a metal having a melting point of 250° C. or less.
3. A solder paste comprising monodisperse spherical metal particles having a cumulative volume distribution satisfying the following conditions as prepared:
(a) a particle diameter corresponding to 50 vol % in the distribution is 10 μm or smaller;
(b) a particle diameter corresponding to 10 vol % in the distribution is at least 60% of the particle diameter corresponding to 50 vol % in the distribution; and
(c) a particle diameter corresponding to 90 vol % in the distribution is at most 125% of the particle diameter corresponding to 50 vol % in the distribution, wherein the metal particles are made of a metal having a melting point of 250° C. or less.