Overhead-traveling carrying apparatus
This invention has as an object thereof to provide an overhead-traveling carrying apparatus which is capable of inexpensively incorporating countermeasures for detecting the presence of an obstacle such as a human being or a carelessly placed object during the lowering of an object to be carried onto the load port of a semiconductor manufacturing device prior to the contact of the obstacle with the object to be carried, thereby avoiding such contact. A structure is adopted in which obstacle detecting sensors which scan the raising and lowering path between a carriage and the load port of each semiconductor manufacturing apparatus, and which detect the presence of obstacles, are provided on the carriage with attached hoist.
1. An overhead-traveling carrying apparatus provided with a track, which is installed overhead of manufacturing apparatuses, and carriages with attached hoists, which travel along the track, wherein
said carriages with attached hoists are provided with an obstacle detecting sensor for detecting the presence of obstacles by optically searching a raising and lowering path between a carriage and a load port of each of said manufacturing apparatus, wherein
said obstacle detecting sensor is a scannable range-finding sensor comprising a light emitting part and a light collecting part, and said obstacle detecting sensor scans a fan shaped scan range centering on said obstacle detecting sensor, and wherein
a range of said optical searching is set in advance in accordance with the height of said load port of each of said manufacturing apparatuses so that said load port is not detected as an obstacle.