Integrated device based upon semiconductor technology, in particular chemical microreactor
An integrated device based upon semiconductor technology, in particular a chemical microreactor, including a semiconductor body having a high-temperature operating portion and a low temperature operating portion. The semiconductor body is provided with a thermal-insulation device including a dissipator element arranged between the high-temperature operating portion and the low-temperature operating portion. The dissipator includes a membrane connecting the high-temperature operating portion and the low-temperature operating portion, and a plurality of diaphragms that extend substantially orthogonal to the membrane and are parallel to one another.
1. A method of performing a biological test, comprising applying a biological fluid to an integrated device including:
a) a semiconductor body having a first portion, a second portion, and a mid-portion positioned between the first and second portions;
b) a hydraulic circuit including an inlet fluidly connected to a buried channel positioned in the first portion of the body, fluidly connected to an outlet positioned in the second portion of the body;
c) a heating element positioned in the first portion of the body and thermally linked to the buried channel;
d) a heat dissipator positioned in the mid-portion of the body and thermally linked to the outlet to substantially block propagation of heat from the heating element to the second portion of the body; and
e) a sensing electrode positioned in the outlet;
whereby said biological fluid is tested in the buried channel and the results of the test are sensed at the sensing electrode.
2. The method of claim 1 wherein the biological fluid contains nucleic acid and the test is amplification of nucleic acid.
3. The method of claim 1 wherein the biological fluid contains DNA and the test is amplification of DNA.