Duplexer filter having film bulk acoustic resonator and semiconductor package thereof
Disclosed are a film bulk acoustic resonator, a duplexer filter having the same, and a semiconductor package thereof. The film bulk acoustic resonator comprising: a semiconductor substrate; a lower electrode more than two layers formed at an upper surface of the semiconductor substrate; a piezoelectric layer deposited on an upper surface of the lower electrode with a certain thickness; and an upper electrode more than two layers formed at an upper surface of the piezoelectric layer, has an excellent bonding characteristic. The duplexer filter can microminiaturize a size thereof by integrating a film bulk acoustic filter formed by connecting the plurality of film bulk acoustic resonators serially and in parallel and peripheral passive elements of the film bulk acoustic filter into one semiconductor chip. Also, the semiconductor package is suitable for the duplexer filter.
1. A semiconductor package comprising:
a semiconductor chip having a transmission side film bulk acoustic filter and a reception side film bulk acoustic filter formed at an upper surface of a semiconductor substrate accordingly as a plurality of film bulk acoustic resonators are connected serially and in parallel;
a substrate provided with a ceramic body where the semiconductor chip is mounted, a plurality of wire patterns formed at an upper surface of the ceramic body so that the semiconductor chip can be connected thereto by a solder as a flip chip form with an overturned state, and a plurality of conductive ground vias and signal conductive vias connected to the plurality of wire patterns and penetrating the ceramic body; and
a sealing layer for sealing the semiconductor chip of the upper surface of the ceramic body for protection from the external environment, wherein the sealing layer is one selected from epoxy or polymer.
2. The semiconductor package of claim 1 , further comprising a plurality of passive elements at the semiconductor chip.
3. The semiconductor package of claim 1 , wherein the substrate is one selected from a low temperature co-fired ceramic (LTCC) or a high temperature co-fired ceramic (HTCC).
4. The semiconductor package of claim 1 , wherein the substrate is an LTCC where a plurality of passive elements are formed, and the plurality of passive elements are formed inside the LTCC.
5. The semiconductor package of claim 1 , further comprising an air gap for preventing characteristics of the transmission side film bulk acoustic filter and the reception side film bulk acoustic filter formed at the surface of the semiconductor substrate from being deteriorated between the lower surface of the semiconductor chip and the substrate.