Inkjet printhead apparatus
An inkjet printhead having a series of nozzles for the ejection of ink wherein each said nozzle has a rim formed by the deposition of a rim material layer ( 42 ) over a sacrificial layer ( 41 ) and a subsequent planar removal of at least said rim material layer so as to form said nozzle rim.
1. An inkjet printhead having a series of nozzles for the ejection of ink wherein each said nozzle has a rim formed by the deposition of a rim material layer over a sacrificial layer and a subsequent planar removal of at least said rim material layer so as to form said nozzle rim.
2. An inkjet printhead as claimed in claim 1 wherein said planar removal comprises chemical-mechanical planarization of said rim material layer.
3. An inkjet printhead as claimed in claim 2 wherein parts of said sacrificial layer are also removed by said planar removal.
4. An inkjet printhead as claimed in claim 1 wherein said planar removal process is an etching process.
5. An inkjet printhead as claimed in claim 1 wherein said rim material layer comprises TEOS glass.
6. An inkjet printhead as claimed in claim 1 wherein said rim material layer is PECVD Si 3 N 4 .
7. An injet printhead as claimed in claim 1 wherein said rim material layer is MOCVD TiN.
8. An inkjet printhead as claimed in claim 1 wherein said rim material layer is ECR CVD TiN.