Surface acoustic wave resonator and surface acoustic wave filter
View Patent ↗A surface acoustic wave resonator includes a piezoelectric substrate, and a SAW resonator having an interdigital transducer. The interdigital transducer satisfies 0.15L≦W≦0.45L where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the said interdigital transducer in a direction of SAW propagation.
1. A ladder-type surface acoustic wave filter comprising:
a piezoelectric substrate of LiTaO 3 ; and
an acoustic wave (SAW) resonator having an interdigital transducer formed on the piezoelectric substrate,
wherein the interdigital transducer satisfies:
0.15L≦W≦0.45L
where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the interdigital transducer in a direction of SAW propagation, wherein:
the interdigital transducer has a single electrode arrangement; and
a pattern width wa of the electrode fingers that form the interdigital transducer satisfies:
15%≦wa≦25%.
2. The surface acoustic wave resonator as claimed in claim 1 ,
wherein the interdigital transducer is formed by a metal film and has bus bars thicker than other portions of the interdigital transducer.
3. The ladder-type surface acoustic wave filter as claimed in claim 1 ,
further comprising a dielectric film provided on bus bars of the interdigital transducer,
wherein the interdigital transducer has a surface portion in the absence of the dielectric film.
4. The surface acoustic wave resonator as claimed in claim 1 ,
further comprising a dielectric film provided on the interdigital transducer, wherein the dielectric film comprises a first portion that is provided on bus bars of the interdigital transducer and is thicker than a second portion provided on the electrode fingers.
5. The ladder-type surface acoustic wave filter according to claim 1 , wherein the electrode fingers that form the interdigital transducer have an identical pattern width.
6. A surface acoustic wave resonator comprising:
a piezoelectric substrate; and
an acoustic wave (SAW) resonator having an interdigital transducer,
wherein the interdigital transducer satisfies:
0.15L≦W≦0.45L
where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of said at least one interdigital transducer in a direction of SAW propagation,
wherein the electrode fingers that form the interdigital transducer have different pattern widths.
7. The surface acoustic wave resonator according to claim 6 , further comprising reflectors arranged at both sides of the interdigital transducer.
8. The surface acoustic wave resonator according to claim 6 , wherein the piezoelectric substrate is made of 42° Y-cut X-propagation LiTaO 3 .
9. The surface acoustic wave resonator as claimed in claim 6 , wherein the interdigital transducer is formed by a metal film and has bus bars thicker than other portions of the interdigital transducer.
10. The surface acoustic wave resonator as claimed in claim 6 , further comprising a dielectric film provided on bus bars of the interdigital transducer;
wherein the interdigital transducer has a surface portion in the absence of the dielectric film.
11. The surface acoustic wave resonator as claimed in claim 6 , further comprising a dielectric film provided on the interdigital transducer, wherein the dielectric film comprises a first portion that is provided on bus bars of the interdigital transducer and is thicker than a second portion provided on the electrode finger.
12. A surface acoustic wave resonator comprising:
a piezoelectric substrate; and
an acoustic wave (SAW) resonator having an interdigital transducer,
wherein the interdigital transducer satisfies:
0.15L≦W≦0.45L
where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the interdigital transducer in a direction of SAW propagation,
the surface acoustic wave resonator further comprising dummy electrode fingers provided so as to face ends of the electrode fingers of the interdigital transducer, wherein the dummy electrode fingers have a pattern width wd that satisfies:
wa≦wd≦70%
where wa is a pattern width of the electrode fingers involved in SAW excitation.
13. A surface acoustic wave resonator comprising:
a piezoelectric substrate; and
an acoustic wave (SAW) resonator having an interdigital transducer,
wherein the interdigital transducer satisfies:
0.15L≦W≦0.45L
where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the interdigital transducer in a direction of SAW propagation,
the surface acoustic wave resonator further comprising dummy electrode fingers provided so as to face ends of the electrode fingers of the interdigital transducer, wherein the dummy electrode fingers have a length d that satisfies:
1×pi≦d≦4×pi
where pi is one period of the interdigital transducer.
14. A ladder-type surface acoustic wave filter comprising:
a piezoelectric substrate of LiTaO 3 ; and
an acoustic wave (SAW) resonator having an interdigital transducer formed on the piezoelectric substrate,
wherein the interdigital transducer satisfies:
0.15L≦W≦0.45L
where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the interdigital transducer in a direction of SAW propagation, further comprising dummy electrode fingers provided so as to face ends of the electrode fingers of the interdigital transducer.
15. A ladder-type surface acoustic wave filter comprising:
a piezoelectric substrate of LiTaO 3 ; and
surface acoustic wave (SAW) resonators that are formed on the piezoelectric substrate and are electrically connected in series,
each of the SAW resonators having an interdigital transducer that satisfies:
0.15L≦W≦0.45L
where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the interdigital transducer in a direction of SAW propagation.
16. A ladder-type surface acoustic wave filter comprising:
a piezoelectric substrate of LiTaO 3 ; and
surface acoustic wave (SAW) resonators that are formed on the piezoelectric substrate and are electrically connected in series,
the SAW resonators including a SAW resonator having an interdigital transducer that satisfies:
0.15L≦W≦0.45L
where W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the interdigital transducer in a direction of SAW propagation.
17. A surface acoustic wave filter comprising:
a double mode type surface acoustic wave (SAW) filter and a ladder-type SAW filter electrically connected thereto,
said ladder-type SAW filter comprising a piezoelectric substrate of LiTaO 3 ; and an acoustic wave (SAW) resonator having an interdigital transducer formed on the piezoelectric substrate,
wherein said at least one interdigital transducer satisfies:
0.15L≦W≦0.45L
wherein W is the total of widths of all electrode fingers that form the interdigital transducer, and L is a length of the interdigital transducer in a direction of SAW propagation.