Semiconductor device and method for manufacturing partial SOI substrates
There is closed a semiconductor device which comprises a semiconductor substrate including an SOI region where a first insulating film is buried, and a non-SOI region, the semiconductor substrate being provided with a boundary region formed between the SOI region and the non-SOI region and having a second insulating film buried therein, the second insulating film being inclined upward from the SOI region side toward the non-SOI region side, the second insulating film having a thickness smaller than the thickness of the first insulating film and being tapered from the SOI region side to the non-SOI region side, a pair of element isolating insulating regions separately formed in the non-SOI region of semiconductor substrate and defining element regions, a pair of impurity diffusion regions formed in the element regions, and a gate electrode formed via a gate insulating film in the element region of the semiconductor substrate.
1. A semiconductor device comprising:
a semiconductor substrate including an SOI region where a first insulating film is buried, and a non-SOI region, said semiconductor substrate being provided with a boundary region formed between said SOI region and said non-SOI region and having a second insulating film buried therein, said second insulating film being inclined upward from the SOI region side toward the non-SOI region side, said second insulating film having a thickness which is smaller than the thickness of said first insulating film and being tapered from the SOI region side to the non-SOI region side;
a pair of element isolating insulating regions separately formed in said non-SOI region of semiconductor substrate and defining element regions;
a pair of impurity diffusion regions formed in said element regions and in contact with said element isolating insulating regions, respectively; and
a gate electrode formed via a gate insulating film in the element region of said semiconductor substrate.
2. The semiconductor device according to claim 1 , wherein said second insulating film formed in said boundary region of said semiconductor substrate is buried as a continuous film all along the lateral direction of said boundary region.
3. The semiconductor device according to claim 1 , wherein said second insulating film formed in said boundary region of said semiconductor substrate is intermittently formed in said boundary region.
4. The semiconductor device according to claim 1 , wherein the width of said boundary region in said semiconductor substrate is within the range of 1 to 5 μm.
5. The semiconductor device according to claim 1 , wherein the distance from one end of said boundary region located on the non-SOI region side to said impurity diffusion region is 0.5 μm or more.
6. The semiconductor device according to claim 1 , wherein said semiconductor substrate is a silicon substrate.
7. The semiconductor device according to claim 1 , wherein said first insulating film and said second insulating film are both formed of a silicon oxide film.