Method for fabricating fiber bragg grating elements and planar light circuits made thereof
View Patent ↗A method for fabricating Fiber Bragg Grating elements and planar light circuits made thereof. A mask having a predetermined pattern and a wafer are provided, wherein a light-guiding channel filled with light-guiding substance is formed on the wafer. A photoresist layer is then formed to cover the wafer. Magnification of a photolithography apparatus is adjusted to a first magnification, followed by transferring the pattern on the mask to the photoresist layer to form a first pattern. Light-guiding substance not covered by the photoresist layer is then removed so that the first pattern is transferred to the light-guiding channel. The light-guiding channel then forms a Fiber Bragg Grating element.
1. A method for fabricating a Fiber Bragg Grating element, comprising:
(a) providing a mask having a predetermined pattern and a wafer, wherein a light-guiding channel filled with light-guiding substance is formed on the wafer, and a photoresist layer is formed on the wafer;
(b) adjusting a magnification of a photolithography apparatus to a first magnification and transferring the predetermined pattern on the mask to the photoresist layer on the wafer to form a first pattern; and
(c) removing the light-guiding substance not covered by the photoresist layer so that the first pattern is transferred to the light-guiding channel thus forming the Fiber Bragg Grating element, which picks out a light of a specific wavelength.
2. The method as claimed in claim 1 , wherein the mask comprises a glass substrate.
3. The method as claimed in claim 1 , wherein the predetermined pattern is made of Cr.
4. The method as claimed in claim 1 , further comprising:
(d) adjusting the magnification of the photolithography apparatus to a second magnification so that the predetermined pattern is transferred to the photoresist layer to form a second pattern, wherein the second magnification is not equal to the first magnification, and the first pattern and the second pattern are formed on the light-guiding channel without overlapping one another;
wherein the first pattern and the second pattern are simultaneously transferred in step (c) to the light-guiding channel on the wafer.
5. The method as claimed in claim 1 , wherein the first magnification is a positive integer or a non-positive integer.