Device and method for the examination of samples in a non vacuum environment using a scanning electron microscope
View Patent ↗A chamber suitable for use with a scanning electron microscope. The chamber comprises at least one aperture sealed with a membrane. The membrane is adapted to withstand a vacuum, and is transparent to electrons and the interior of the chamber is isolated from said vacuum. The chamber is useful for allowing wet samples including living cells to be viewed under an electron microscope.
1. A scanning electron microscope assembly comprising:
a scanning electron microscope providing a beam of electrons to a specimen region maintained at a pressure below the vapor pressure of water;
a specimen enclosure assembly disposed in the specimen region at a pressure below the vapor pressure of water and comprising:
a rigid specimen enclosure having an aperture and defining an enclosed specimen placement volume; and
an electron beam permeable, fluid impermeable, vacuum tolerant cover sealing said specimen placement volume at said aperture from a volume outside said enclosure.
2. A scanning electron microscope assembly according to claim 1 and wherein said cover is formed from a material selected from the group consisting of: polyimide, polyamide, polyamide-imide, polyethylene, polypyrrole, PARLODION, COLLODION, KAPTON, FORMVAR, VINYLEC, BUTVAR, PIOLOFORM, silicon dioxide, silicon monoxide and carbon.
3. A scanning electron microscope assembly according to claim 1 and also comprising an apertured mechanical support for said cover, which defines openings having at least one dimension of no less than 100 microns.
4. A scanning electron microscope assembly according to claim 1 and wherein said enclosure is constructed and configured so as to prevent transmission of electron beams through said specimen enclosure assembly while permitting impingement of electrons into said specimen placement volume and reflection of said electrons from locations within said specimen placement volume.
5. A scanning electron microscope assembly according to claim 1 and wherein said enclosure and said cover are constructed and configured so as to ensure a specimen is engaged with said cover.
6. A scanning electron microscope assembly according to claim 1 and wherein said cover generally is gas impermeable up to at least a pressure gradient of one atmosphere.
7. A scanning electron microscope assembly according to claim 1 and wherein said enclosed specimen placement volume has dimensions all of which exceed 10 microns and defines an aperture communicating with said enclosed specimen placement volume.
8. A scanning electron microscope assembly according to claim 1 and wherein said cover generally is permeable to electrons having energies in excess of 2 KeV.
9. A scanning electron microscope assembly according to claim 1 and also comprising a pressure relief device communicating with said enclosed specimen placement volume.
10. A scanning electron microscope assembly according to claim 1 and also comprising a light collector operative to collect light generated from an interaction between electrons and a specimen at a location within said enclosed specimen placement volume.