Asymmetrical programming ferroelectric memory transistor
A method of fabricating and programming a ferroelectric memory transistor for asymmetrical programming includes fabricating a ferroelectric memory transistor having a metal oxide layer overlaying a gate region; and programming the ferroelectric memory transistor so that a low threshold voltage is about equal to the intrinsic threshold voltage of the ferrorelectric memory transistor.
1. A method of fabricating and programming a ferroelectric memory transistor for asymmetrical programming, comprising:
fabricating a ferroelectric memory transistor having a metal oxide layer overlaying a gate region wherein a memory window is defined by:
Δ
V
T
=
2
Q
R
C
FE
; and
programming the ferroelectric memory transistor so that a low threshold voltage is about equal to an intrinsic threshold voltage of the ferrorelectric memory transistor.
2. The method of claim 1 wherein the ferroelectric memory transistor is a MFMox transistor and the intrinsic and low threshold voltages are define by:
V
TL
=
V
FB
+
φ
SO
-
2
q
ɛ
N
A
φ
SO
-
Q
PL
C
FE
.
3. The method of claim 2 wherein Q PL is nearly equal to zero, and the ferroelectric memory transistor is a MFMox transistor and the intrinsic and low threshold voltages are define by:
V
TL
=
V
FB
+
φ
SO
-
2
q
ɛ
N
A
φ
SO
C
FE
.
4. A method of fabricating and programming a ferroelectric memory transistor for asymmetrical programming, comprising:
fabricating a ferroelectric memory transistor having a metal oxide layer overlaying a gate region wherein a memory window is defined by:
Δ
V
T
=
2
Q
R
C
FE
; and
programming the ferroelectric memory transistor so that a low threshold voltage is about equal to an intrinsic threshold voltage of the ferrorelectric memory transistor.
5. The method of claim 4 wherein the ferroelectric memory transistor is a MFMox transistor and the intrinsic and low threshold voltages are define by:
V
TL
=
V
FB
+
φ
SO
-
2
q
ɛ
N
A
φ
SO
-
Q
PL
C
FE
.
6. The method of claim 4 wherein Q PL is nearly equal to zero, and the ferroelectric memory transistor is a MFMox transistor and the intrinsic and low threshold voltages are define by:
V
TL
=
V
FB
+
φ
SO
-
2
q
ɛ
N
A
φ
SO
C
FE
.