Image processing method, an image processing device and a bonding apparatus
An image processing of an object to be detected in bonding system for manufacturing, for instance, semiconductor devices including a step of calculation of a difference value between a reference image inputted beforehand and a rotated image obtained by rotating the reference image for a plurality of reference points within the reference image, a step of mask pattern production based upon the difference values for the plurality of reference points, and a step of position detection for a position of an object of detection by pattern matching by way of using an image of the object of detection obtained by imaging the object of detection, the reference image and the mask pattern.
1. An image processing method comprising:
a step of performing a difference value calculation between a reference image inputted beforehand and a rotated image obtained by rotating said reference image, said difference value calculation being executed for each one of a plurality of reference points within said reference image,
a step of performing a mask pattern production based upon difference values for said plurality of reference points, and then
a step of performing a position detection of an object of detection by pattern matching using an image of said object of detection obtained by imaging said object of detection, said reference image and said mask pattern.
2. The image processing method according to claim 1 , wherein said step of performing a difference value calculation is performed at relative positions of said rotated image and said reference image that are located within a specified range from relative positions of two images at which an amount of coincidence between said two images shows a maximum value.
3. The image processing method according to claim 1 or 2 , wherein
said step of performing a difference value calculation is performed for a plurality of different angles of rotation; and
said step of performing a mask pattern production includes a maximum-value image production step that produces a maximum-value image that contains absolute values of difference values that are within a specified range from a maximum value among said absolute values of said difference values for said reference points calculated for said plurality of angles of rotation as evaluation values for said reference points.
4. The image processing method according to claim 3 , wherein said step of performing a mask pattern production further includes:
a comparison step that compares respective evaluation values in said maximum-value image with a specified threshold value, and
a selection step that selects reference points that exceed said threshold value.
5. The image processing method according to claim 1 or 2 , wherein said step of performing a position detection includes an exclusion step that excludes regions which correspond to said mask pattern in said image of said object of detection from an object of said pattern matching.
6. The image processing method according to claim 3 , wherein said step of performing a position detection includes an exclusion step that excludes regions which correspond to said mask pattern in said image of said object of detection from an object of said pattern matching.
7. The image processing method according to claim 4 , wherein said step of performing a position detection includes an exclusion step that excludes regions which correspond to said mask pattern in said image of said object of detection from an object of said pattern matching.
8. An image processing device comprising:
a difference value calculation means that calculates a difference value between a reference image inputted beforehand and a rotated image obtained by rotating said reference image, said difference value being calculated for each one of a plurality of reference points within said reference image,
a mask pattern production means that produces a mask pattern based upon said difference values for said plurality of reference points, and
a position detection means that detects a position of an object of detection by pattern matching using an image of said object of detection obtained by imaging said object of detection, said reference image and said mask pattern.
9. A bonding apparatus provided with an image processing device, wherein said image processing device is comprised of:
a difference value calculation means that calculates a difference value between a reference image inputted beforehand and a rotated image obtained by rotating said reference image for a plurality of reference points within said reference image, said difference value being calculated for each one of a plurality of reference points within said reference image,
a mask pattern production means that produces a mask pattern based upon said difference values for said plurality of reference points, and
a position detection means that detects a position of an object of detection by pattern matching using an image of said object of detection obtained by imaging said object of detection, said reference image and said mask pattern.