Thin film forming apparatus and thin film forming method
View Patent ↗Prior to the start of transfer of an insulation film to a substrate, the degree of opening of a butterfly valve is set small so that evaporation of a solvent component contained in the insulation film is suppressed and the fluidity of the insulation film is ensured at the start of the transfer. On the other hand, the butterfly valve is totally opened at the start of the transfer, so that the pressure inside a thin film forming chamber rapidly decreases and transfer of the insulation film to the substrate is performed always in a low-pressure state (high-degree of vacuum).
1. A thin film forming apparatus, comprising:
a processing container whose inside is a thin film forming chamber;
substrate holding means which holds a substrate in said thin film forming chamber;
film holding means which is disposed to face said substrate holding means in said thin film forming chamber, and holds a sheet film in a condition that a thin film disposed on a surface of said sheet film is directed toward said substrate;
loading means which moves at least one of said substrate holding means and said film holding means, presses said substrate and said sheet film against each other, and transfers said thin film to said substrate; and
pressure controlling means which adjusts the pressure inside said thin film forming chamber in accordance with an operating state of at least said loading means,
wherein said pressure controlling means comprises:
an exhausting unit which is linked to said thin film forming chamber and evacuates said thin film forming chamber;
an exhaust adjusting unit which is inserted between said exhausting unit and said thin film forming chamber and is capable of adjusting the volume of exhaust air per unit time exhausted from said thin film forming chamber to said exhausting unit; and
a pressure adjusting unit which controls said exhaust adjusting unit in accordance with an operating state of said loading means and accordingly adjusts the pressure inside said thin film forming chamber.
2. The thin film forming apparatus of claim 1 , wherein said pressure adjusting unit sets the volume of exhaust air per unit time before the start of transfer of said thin film to be smaller than the volume of exhaust air per unit time during the transfer of said thin film.
3. The thin film forming apparatus of claim 1 , wherein said pressure controlling means comprises gas supplying means which is linked to said thin film forming chamber and supplies gas to said thin film forming chamber.
4. The thin film forming apparatus of claim 3 , wherein said gas supplied to said thin film forming chamber is nitrogen gas.
5. The thin film forming apparatus of claim 3 , wherein said gas supplying means comprises a mass flow controller which controls the inflow of said gas which is supplied to said thin film forming chamber.
6. The thin film forming apparatus of claim 5 , wherein said mass flow controller maintains the flow rate of said gas which is supplied to said thin film forming chamber regardless of the pressure inside said thin film forming chamber.
7. The thin film forming apparatus of claim 1 , wherein said pressure controlling means adjusts the pressure inside said thin film forming chamber at the start of said transfer of said thin film to said substrate by said loading means.
8. A thin film forming apparatus, comprising:
a processing container whose inside is a thin film forming chamber;
substrate holding means which holds a substrate in said thin film forming chamber;
film holding means which is disposed to face said substrate holding means in said thin film forming chamber, and holds a sheet film in a condition that a thin film disposed on a surface of said sheet film is directed toward said substrate;
loading means which moves at least one of said substrate holding means and said film holding means, presses said substrate and said sheet film against each other, and transfers said thin film to said substrate; and
pressure controlling means which adjusts the pressure inside said thin film forming chamber in accordance with an operating state of at least said loading means,
wherein said pressure controlling means comprises:
an exhaust pump which is linked to said thin film forming chamber and evacuates said thin film forming chamber; and
a pressure adjusting unit which controls a voltage applied upon said exhaust pump in accordance with an operating state of said loading means and accordingly adjusts the pressure inside said thin film forming chamber.
9. The thin film forming apparatus of claim 8 , wherein said pressure adjusting unit sets the applied voltage upon said exhaust pump before the start of transfer of said thin film to be smaller than the applied voltage upon said exhaust pump during the transfer of said thin film.
10. The thin film forming apparatus of claim 8 , wherein said pressure controlling means comprises gas supplying means which is linked to said thin film forming chamber and supplies gas to said thin film forming chamber.
11. The thin film forming apparatus of claim 8 , wherein said pressure controlling means adjusts the pressure inside said thin film forming chamber at the start of said transfer of said thin film to said substrate by said loading means.
12. A thin film forming apparatus, comprising:
a processing container whose inside is a thin film forming chamber;
substrate holding means which holds a substrate in said thin film forming chamber;
film holding means which is disposed to face said substrate holding means in said thin film forming chamber, and holds a sheet film in a condition that a thin film disposed on a surface of said sheet film is directed toward said substrate;
loading means which moves at least one of said substrate holding means and said film holding means, presses said substrate and said sheet film against each other, and transfers said thin film to said substrate;
pressure controlling means which adjusts the pressure inside said thin film forming chamber in accordance with an operating state of at least said loading means; and
exhausting means which evacuates said thin film forming chamber,
wherein said pressure controlling means adjusts the volume of exhaust air per unit time exhausted by said exhausting means from said thin film forming chamber and controls the pressure inside said thin film forming chamber in such a manner that the pressure inside thin film forming chamber becomes different between before and during the transfer.
13. The thin film forming apparatus of claim 12 , wherein said pressure controlling means evacuates and depressurizes said thin film forming chamber from before the transfer, and in response to the start of the transfer, increases the volume of exhaust air from said thin film forming chamber per unit time so that the volume of exhaust air becomes larger than that before the transfer and the pressure inside said thin film forming chamber further decreases.
14. The thin film forming apparatus of claim 12 , wherein said pressure controlling means comprises gas supplying means which supplies gas to said thin film forming chamber.