Organic electroluminescence panel having a substrate and a sealing panel sealed by adhering an inorganic film and the sealing panel using a sealing material
To effectively prevent intrusion of moisture into a space above an organic EL element, a moisture blocking layer made of a silicon-based nitride film such as SiNx or a TEOS film formed to cover a drain electrode and source electrode of a TFT is formed on the entire surface of the element. A sealing glass is attached to the moisture blocking layer by a sealing material on the peripheral region of the substrate. The intrusion of moisture from the outside is effectively prevented by the moisture blocking layer.
1. An organic electroluminescence panel comprising:
a substrate onto which a plurality of organic EL elements provided in a matrix form and a plurality of thin film transistors for driving the organic EL elements are formed; and
a sealing panel for sealing a region above a pixel area in which the organic EL elements are provided, attached to a peripheral region of the substrate, wherein
an inorganic film and an organic film are formed over the upper surface of the substrate,
the organic EL elements are provided above the thin film transistors, the inorganic film, and the organic film on the substrate,
the substrate and the sealing panel are sealed by adhering the inorganic film and the sealing panel using a sealing material, and
the organic EL element is formed of layers above the thin film transistor on the substrate, and the inorganic film is formed to cover the thin film transistor.
2. An organic electroluminescence panel comprising:
a substrate onto which a plurality of organic EL elements provided in a matrix form and a plurality of thin film transistors for driving the organic EL elements are formed; and
a sealing panel for sealing a region above a pixel area in which the organic EL elements are provided, attached to a peripheral region of the substrate, wherein
an inorganic film and an organic film are formed over the upper surface of the substrate,
the organic EL elements are provided above the thin film transistors, the inorganic film, and the organic film on the substrate,
the substrate and the sealing panel are sealed by adhering the inorganic film and the sealing panel using a sealing material,
a portion of the thin film transistor is placed below the sealing material on the substrate,
a source electrode or a drain electrode of the thin film transistor below the sealing material is present below the sealing material, an electrode protection layer is provided to cover these electrodes, and the electrode protection layer is covered by the sealing material, and
a planarization film is formed between the organic EL element and the inorganic film, the planarization film ending at a position internal to the position where the substrate and the sealing panel are sealed, and the electrode protection layer is formed of the same material as the planarization film.
3. An organic electroluminescence panel according to claim 2 , wherein the electrode protection layer and the planarization film are organic films.
4. An organic electroluminescence panel comprising:
a substrate onto which a plurality of organic EL elements provided in a matrix form and a plurality of thin film transistors for driving the organic EL elements are formed; and
a sealing panel for sealing a region above a pixel area in which the organic EL elements are provided, attached to a peripheral region of the substrate, wherein
an inorganic film is formed over the upper surface of the substrate,
the substrate and the sealing panel are sealed by adhering the inorganic film and the sealing panel using a sealing material,
the organic EL element is formed of layers above the thin film transistor on the substrate,
the inorganic film is formed to cover the thin film transistor,
the organic EL element is formed of layers above the inorganic film on the substrate,
the organic EL element is formed of layers above a planarization film formed on the inorganic film, and
the planarization film ends at a position internal to the position where the substrate and the sealing panel are sealed.
5. An organic electroluminescence panel according to claim 4 , wherein
the inorganic film is a silicon-based nitride film.
6. An organic electroluminescence panel according to claim 4 , wherein
the inorganic film is a silicon-based oxide film.
7. An organic electromluminescence panel according to claim 4 , wherein
the planarization film is an organic film.
8. An organic electroluminescence panel according to claim 4 , wherein
a portion of the thin film transistor is placed below the sealing material on the substrate.
9. An organic electroluminescence panel according to claim 8 , wherein
when a source electrode or a drain electrode of the thin film transistor below the sealing material is present below the sealing material, an electrode protection layer is provided to cover these electrodes, and the electrode protection layer is covered by the sealing material.
10. An organic electroluminescence panel according to claim 9 , wherein
a planarization film is formed between the organic EL element and the inorganic film, the planarization film ending at a position internal to the position where the substrate and the sealing panel are sealed, and
the electrode protection layer is formed of the same material as the planarization film.
11. An organic electroluminescence panel according to claim 10 , wherein
the electrode protection layer and the planarization film are organic films.
12. An organic electroluminescence panel comprising:
a substrate onto which a plurality of organic EL elements provided in a matrix form and a plurality of thin film transistors for driving the organic EL elements are formed; and
a sealing panel for sealing a region above a pixel area in which the organic EL elements are provided, attached to a peripheral region of the substrate, wherein
an inorganic film is formed over the upper surface of the substrate,
a planarization film is formed above the inorganic film,
the organic EL element is formed above the planarization film,
the substrate and the sealing panel are sealed by adhering the inorganic film and the sealing panel using a sealing material,
the planarization film ends before reaching a seal, and
a portion of the planarization film ends at a position internal to the sealing material,
an electrode is placed below the sealing material, and
a portion of the planarization film covers the electrodes provided below the sealing material.
13. An organic electroluminescence panel according to claim 12 , wherein
the planarization film is an organic film.