Ceramic heater
A ceramic heater includes a ceramic substrate having a heating face, a resista nce heating element embedded in the substrate and a terminal electrically connected with the resistance heating element. The resistance heating element includes first and second coiled windings. The first winding has a coil diameter that is larger than the coil diameter of the second winding. A non-wound wire may also be used instead of the second winding.
1. A ceramic beater comprising a ceramic substrate having a heating face, a resistance heating element embedded in said substrate, and a terminal electrically connected with said resistance heating element, said resistance heating element including at least two first coiled windings and a second coiled winding, said first windings having a coil diameter that is larger than a coil diameter of said second winding, a first connecting terminal connecting one of said first coiled windings and said second coiled winding, and a second connecting terminal connecting another of said first coiled windings and said second coiled winding.
2. The ceramic heater of claim 1 , wherein said substrate further includes at least one structural defect and wherein a distance between said structural defect and said second winding is not larger than 40 mm.
3. The ceramic heater of claim 2 , wherein said distance between said structural defect and said second winding is not smaller than 2 mm.
4. The ceramic heater of claim 1 , wherein said first and second windings are provided along a plane that is substantially parallel with said heating face of said substrate.
5. A susceptor for mounting a semiconductor comprising the ceramic heater of claim 1 .
6. The ceramic heater of claim 2 , wherein said substrate further includes at least two of said structural defects, and wherein said second winding passes through a space provided between said structural defects.
7. A ceramic heater comprising a ceramic substrate having a heating face, a resistance heating element embedded in said substrate, a terminal electrically connected with said resistance heating element, said resistance heating element including at least two coiled windings, at least one non-wound wire, a first connecting terminal connecting one of said coiled windings and said non-wound wire, and a second connecting terminal connecting another of said coiled windings and said non-wound wire;
wherein said coiled windings and said non-wound wire are provided along a plane that is substantially parallel with said heating face of said substrate; and
wherein said non-wound wire is provided between said one and said another of said coiled windings.
8. The ceramic heater of claim 7 , wherein said substrate further includes at least one structural defect and wherein a distance between said structural defect and said non-wound wire is not larger than 40 mm.
9. The ceramic heater of claim 8 , wherein said distance between said structural defect and said non-wound wire is not smaller than 2 mm.
10. A susceptor for mounting a semiconductor comprising the ceramic heater of claim 7 .
11. The ceramic heater of claim 8 , wherein said substrate further includes at least two of said structural defects, and wherein said non-wound wire passes through a space provided between said structural defects.
12. A ceramic heater comprising a ceramic substrate having a heating face and including at least one structural defect, a resistance heating element embedded in said substrate and a terminal electrically connected with said resistance heating element, wherein said resistance heating element includes a coiled winding and a non-wound wire, wherein said coiled winding and said non-wound wire are provided along a plane that is substantially parallel with said heating face of said substrate, and wherein a distance between said structural defect and said non-wound wire is not larger than 40 mm.
13. The ceramic heater of claim 12 , wherein said distance between said structural defect and said non-wound wire is not smaller than 2 mm.
14. The ceramic heater of claim 12 , wherein said substrate further includes at least two of said structural defects, and wherein said non-wound wire passes through a space provided between said structural defects.
15. A ceramic heater comprising a ceramic substrate having a heating face and at least one structural defect, a resistance heating element embedded in said substrate and a terminal electrically connected with said resistance heating element, said resistance heating element including at least two coiled windings and at least one non-wound wire, said coiled windings and said non-wound wire being provided along a plane that is substantially parallel with said heating face of said substrate, and said non-wound wire being provided between two of said coiled windings, wherein a distance between said structural defect and said non-wound wire is not larger than 40 mm.
16. The ceramic heater of claim 15 , wherein said distance between said structural defect and said non-wound wire is not smaller than 2 mm.
17. The ceramic heater of claim 15 , wherein said substrate includes at least two of said structural defects, and wherein said non-wound wire passes through a space provided between said structural defects.
18. A ceramic heater comprising a ceramic substrate having a heating face and a plurality of structural defects formed therein, a resistance heating element embedded in said substrate, and a terminal electrically connected with said resistance heating element, said resistance heating element including a first coiled winding, a second coiled winding, and a connecting terminal connecting said first coiled winding and said second coiled winding, said first coiled winding having a coil diameter that is larger than a coil diameter of said second winding;
wherein said second coiled winding passes through a space provided between said structural defects and wherein said first coiled winding does not pass through said space.
19. A ceramic heater comprising a ceramic substrate having a heating face and a pair of structural defects formed therein, a resistance heating element embedded in said substrate, and a terminal electrically connected with said resistance heating element, said resistance heating element including a coiled winding, a non-wound wire, and a connecting terminal connecting said coiled winding and said non-wound wire;
wherein said non-wound wire passes through a space provided between said structural defects and wherein said coiled winding does not pass through said space.