Polishing apparatus
The present invention relates to a polishing apparatus for polishing a workpiece such as a semiconductor wafer. The polishing apparatus has a processing section including a polishing section ( 1 ) for polishing a semiconductor wafer ( 6 ) and a cleaning section ( 10 ) for cleaning a polished semiconductor wafer, a receiving section ( 40 ) for supplying a semiconductor wafer ( 6 ) to be polished to the processing section and receiving a polished semiconductor wafer ( 6 ), and a cleaning chamber ( 20 ) disposed between the processing section and the receiving section and defined by partitions ( 102, 103 ) with shutters ( 22, 24 ) which separate the processing section and the receiving section from each other.
1. A polishing apparatus for polishing a semiconductor wafer, comprising:
a processing section including a polishing section for polishing a semiconductor wafer and a cleaning section for cleaning a polished semiconductor wafer;
a receiving section for receiving at least one of wafer cassettes which supplies a semiconductor wafer to be processed to said processing section and/or receives a processed semiconductor wafer;
a clean chamber disposed between said processing section and said receiving section for preventing a contaminated atmosphere in said processing section from affecting said receiving section;
a load and unload section between said processing section and said receiving section;
a first filter unit for cleaning air in said load and unload section while adjusting pressure of said load and unload section so as to be higher than pressure of a clean room in which said polishing apparatus is installed; and
a second filter unit for cleaning air in said cleaning section while adjusting pressure of said cleaning section so as to be lower than the pressure of the clean room and higher than pressure of said polishing section.
2. The polishing apparatus according to claim 1 , wherein pressure in said clean chamber is higher than pressure in said processing section and lower than pressure in said receiving section.
3. The polishing apparatus according to claim 1 , wherein cleanliness in said clean chamber is higher than cleanliness in said processing section.
4. The polishing apparatus according to claim 1 , wherein said clean chamber includes a partition with a shutter which separates said clean chamber from said receiving section or said processing section.
5. The polishing apparatus according to claim 1 , further comprising:
a transfer device, for transferring a semiconductor wafer between said clean chamber and said receiving section, in said load and unload section.