Method of making magnetoresistive head element
A combined stripe of a magnetoresistive (MR) film and domain control stripe layers can be formed below a photoresist film on the surface of a substratum. An insulating base layer is then formed to extend over the surface of the substratum. The insulating base layer is allowed to cover over the photoresist film, the magnetoresistive film and the domain control stripe layers on the substratum. When the photoresist film is removed, the insulating base layer remains on the substratum. The insulating base layer keeps contacting the side surface of the magnetoresistive film. The magnetoresistive film can be kept covered with the insulating base layer at the side surface during a subsequent etching process. Any chemical reaction can be avoided between the magnetoresistive film and the etching gas employed in the etching process. The resulting magnetoresistive head element is allowed to exhibit an ideal characteristic in the magnetoresistive effect.
1. A method of making a magnetoresistive head element, comprising:
forming a magnetoresistive film extending over a surface of a substratum, said magnetoresistive film having a side surface standing on the surface of the substratum;
forming an insulating base layer over the surface of the substratum, said insulating base layer contacting at least partly the side surface of the magnetoresistive film; and
effecting an etching process while keeping the insulating base layer contacting the side surface of the magnetoresistive film.
2. The method of making according to claim 1 , further comprising:
forming a conductive layer covering over at least the magnetoresistive film and the insulating base layer, prior to the etching process; and
exposing the conductive layer to an etching gas with the side surface of the magnetoresistive film kept covered.
3. The method of making according to claim 1 , further comprising:
forming a domain control stripe layer over the surface of the substratum, prior to formation of the insulating base layer, said domain control stripe layer contacting the magnetoresistive film at its tip end; and
allowing the insulating base layer to contact a side surface of the domain control stripe layer adjacent the side surface of the magnetoresistive film.
4. The method of making according to claim 3 , further comprising:
forming a conductive layer covering over at least the magnetoresistive film and the insulating base layer, prior to the etching process; and
exposing the conductive layer to an etching gas with the side surface of the magnetoresistive film kept covered.
5. A method of making a magnetoresistive head element, comprising:
forming a layered composite, corresponding to a layered structure of a magnetoresistive film, over a surface of a substratum;
forming a pair of material layers, corresponding to materials of domain control stripe layers, over the surface of the substratum, said material layers interposing the layered composite therebetween along the surface of the substratum;
forming a resist film on the layered composite and the material layers so as to pattern a shape of the magnetoresistive film and the domain control stripe layers being continuous to one another;
removing the layered composite and the material layers in a region adjacent the resist film so as to shape the magnetoresistive film and the domain control stripe layers out of the layered composite and the material layers below the resist film;
forming an insulating base layer over the resist film and the surface of the substratum; and
removing the resist film so as to expose the magnetoresistive film and the domain control stripe layers at a gap defined in the insulating base layer.
6. The method of making according to claim 5 , further comprising: effecting an etching process while keeping the insulating base layer in a region adjacent the magnetoresistive film over the surface of the substratum.
7. The method of making according to claim 6 , further comprising:
forming a conductive layer covering over at least the magnetoresistive film and the insulating base layer, prior to the etching process; and
exposing the conductive layer to an etching gas with a side surface of the magnetoresistive film kept covered, said side surface being defined to stand on the surface of the substratum.