Ceramic heaters, a method for producing the same and articles having metal members
A ceramic heater is provided including a ceramic sintered body and a heat resistor embedded in the substrate, wherein a change in the temperature uniformity on the heating face is reduced. The heat resistor contains a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table and a carbide of the metal. A ratio (Ic/Im) of a total strength (Ic) of main peak of the metal carbide to a total strength (Im) of main peak strength of the metal is not larger than 0.2. Alternatively, the ratio (Rb−Ra)/Ra is not larger than 30 percent, where “Ra” is the resistance of the heat resistor before sintering and “Rb” is the resistance of the heat resistor after sintering.
1. A ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body;
wherein said heat resistor contains a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table and a carbide of said metal;
wherein a ratio (Ic/Im) of a total (Ic) of a main peak strength of said metal carbide to a total (Im) of a main peak strength of said metal is not larger than 0.2, measured by means of X-ray diffraction; and
wherein said sintered body is produced by sintering a shaped body of ceramic powder in contact with said heat resistor and a dummy member composed of a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table, wherein said dummy member is not connected to a power source such that said dummy member is electrically neutral and wherein said dummy member is not operative when said ceramic heater is operated, and wherein said dummy member is electrically isolated from said heat resistor.
2. The ceramic heater of claim 1 , wherein said ratio (Ic/Im) is not smaller than 0.001.
3. The ceramic heater of claim 1 , wherein said sintered body is produced by sintering a shaped body of ceramic powder in contact with said heat resistor, wherein a ratio (Rb−Ra)/Ra is not larger than 30 percent, where “Ra” is a resistance of said heat resistor before sintering and “Rb” is a resistance of said heat resistor after sintering.
4. The ceramic heater of claim 1 , wherein said sintered body contains a rare earth element in an amount of not larger than 10 weight percent calculated as a rare earth oxide.
5. The ceramic heater of claim 1 , wherein said heat resistor is embedded in said sintered body.
6. A method of producing a ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
contacting a shaped body of ceramic powder with said heat resistor and a dummy member containing a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table, wherein said dummy member is not connected to a power source such that said dummy member is electrically neutral and wherein said dummy member is not operative when said ceramic heater is operated and wherein said dummy member is electrically isolated from said heat resistor; and
sintering said shaped body to provide said sintered body;
wherein said heat resistor contains a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table and a carbide of said metal, and wherein a ratio (Ic/Im) of a total (Ic) of a main peak strength of said metal carbide to a total (Im) of a main peak strength of said metal is not larger than 0.2, measured by means of X-ray diffraction.
7. The method of claim 6 , wherein a ratio (Rb−Ra)/Ra is not larger than 30 percent, where “Ra” is a resistance of said heat resistor before said sintering step and “Rb” is a resistance of said heat resistor after said sintering step.
8. A method of producing a ceramic heater comprising sing a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
contacting a shaped body of ceramic powder with said heat resistor and a dummy member containing a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table, wherein said dummy member is not connected to a power source such that said dummy member is electrically neutral and wherein said dummy member is not operative when said ceramic heater is operated and wherein said dummy member is electrically isolated from said heat resistor;
sintering said shaped body to provide said sintered body; and
removing said dummy member from said sintered body.
9. The method of claim 8 , wherein said heat resistor is embedded in said shaped body.
10. An article comprising a ceramic sintered body and a metal member in contact with said sintered body:
wherein said sintered body is produced by sintering a shaped body of ceramic powder in contact with said metal member and a dummy member containing a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table, wherein said dummy member is not connected to a power source such that said dummy member is electrically neutral and wherein said dummy member is electrically isolated from said metal member; and
wherein said metal member contains a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table and a carbide of said metal, and wherein a ratio (Ic/Im) of a total (Ic) of a main peak strength of said metal carbide to a total (Im) of a main peak strength of said metal is not larger than 0.2, measured by X-ray diffraction.
11. The article of claim 10 , wherein said sintered body contains a rare earth element in an amount of not larger than 10 weight percent calculated as a rare earth oxide.
12. The article of claim 10 , wherein said metal member is embedded in said sintered body.
13. A method of producing a ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
contacting a shaped body of ceramic powder with said heat resistor and a dummy member containing a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table, said dummy member being electrically isolated from said heat resistor;
sintering said shaped body to provide said sintered body; and
removing said dummy member from said sintered body.
14. A method of producing a ceramic heater comprising a ceramic sintered body and a heat resistor in contact with said sintered body, said method comprising the steps of:
contacting a shaped body of ceramic powder with said heat resistor and a dummy member containing a metal comprising one or more metal elements selected from the group consisting of Group IVa, Group Va and Group VIa elements of the Periodic Table, said dummy member being electrically neutral and electrically isolated from said heat resistor;
sintering said shaped body to provide said sintered body; and
removing said dummy member from said sintered body.