Capacitor element and its manufacturing method
The present invention relates to a capacitor element and its manufacturing method. The invention presents a capacitor element comprising a lower electrode, a dielectric film, and an upper electrode, and its manufacturing method, in which the surface of at least one layer of the lower electrode in a single layer structure or laminated structure, for example, the surface of the lower electrode contacting with the dielectric film, is flattened by processing the material itself which composes this surface. For example, it is flattened by filling the recesses at the crystal grain boundary of the surface with the material itself shaved from the surface. As a result, undulations of the surface of the lower electrode of the capacitor element are lessened, and the film thickness of the dielectric film is made uniform, and capacity drop and increase of leak current can be prevented.
1. A capacitor element comprising a lower electrode, a dielectric film, and an upper electrode, wherein the lower electrode has a multi-layered laminated structure, part of at least one of said layers is formed of a metal compound, each of at least two of said layers includes a plurality of crystal grains distributed contiguously across the capacitor forming recesses on respective surfaces of said layers between each adjacent crystal grain, and each surface is substantially flattened by material removed from said surface filling substantially all of each recess.
2. The capacitor element according to claim 1 , wherein each crystal grain has a columnar shape.
3. The capacitor element according to claim 1 , wherein said layer is shaped as a stone hedge.