Decreasing metal-silicide oxidation during wafer queue time
View Patent ↗Disclosed herein are various embodiments of semiconductor devices and related methods of manufacturing a semiconductor device. In one embodiment, a method includes providing a semiconductor substrate and forming a metal silicide on the semiconductor substrate. In addition, the method includes treating an exposed surface of the metal silicide with a hydrogen/nitrogen-containing compound to form a treated layer on the exposed surface, where the composition of the treated layer hinders oxidation of the exposed surface. The method may then further include depositing a dielectric layer over the treated layer and the exposed surface of the metal silicide.
1. A method of manufacturing a semiconductor device, the method comprising:
providing a semiconductor substrate;
forming a metal silicide on the semiconductor substrate; and
treating an exposed surface of the metal silicide with a hydrogen/nitrogen-containing compound to form a Metal-Si—N treated layer on the exposed surface, the nitride portion of the treated layer hindering oxidation of the exposed surface.
2. The method according to claim 1 , wherein the treating further comprises treating the exposed surface for less than 30 seconds.
3. The method according to claim 2 , wherein treating further comprises treating the exposed surface for about 10 seconds.
4. The method according to claim 1 , wherein the hydrogen/nitrogen-containing compound is a hydrogen/nitrogen-containing plasma.
5. The method according to claim 1 , wherein the hydrogen/nitrogen-containing compound is selected from the group consisting of NH 3 , H 2 +N 2 , and NH 3 +N 2 .
6. The method according to claim 1 , wherein the treating further comprises treating the exposed surface at a temperature of about 200–500° C.
7. The method according to claim 1 , wherein the treating further comprises treating the exposed surface using a flow rate of 3200–4000 sccm.
8. The method according to claim 1 , wherein the treating further comprises treating the exposed surface at a pressure of about 3.5 Torr.
9. The method according to claim 1 , wherein the treating further comprises treating the exposed surface using a high frequency/low frequency radio frequency of about 300–600 W/0 W.
10. The method according to claim 1 , further comprising treating the exposed surface after-performing a contact etch process to create a trench down to the metal silicide, the contact etch process removing at least some of the oxidized portions before the treating.
11. The method according to claim 1 , further comprising depositing a contact etch stop layer over the treated layer but before depositing the dielectric layer.
12. The method according to claim 1 , wherein forming a metal silicide comprises forming a metal silicide selected from the group consisting of nickel silicide, cobalt silicide, titanium silicide, tantalum silicide, and tungsten silicide.
13. The method according to claim 1 , wherein the forming comprises forming nickel silicide, and the treating comprises treating an exposed surface of the nickel silicide with NH 3 plasma to form a Ni—Si—N treated layer on the exposed surface, the treated layer hindering the formation of NiO on the exposed surface.
14. The method according to claim 13 , wherein the treating further comprises treating the exposed surface for less than about 30 seconds, at a temperature of about 200–500° C., using a flow rate of 3200–4000 sccm, at a pressure of about 3.5 Torr, and using a high frequency/low frequency radio frequency of about 300–600 W/0 W.
15. A semiconductor device, comprising:
a semiconductor substrate;
a metal silicide formed on the semiconductor substrate;
a treated layer comprising Metal-Si—N formed from an exposed surface of the metal silicide by treating the exposed surface with a hydrogen/nitrogen-containing compound, the nitride portion of the treated layer hindering oxidation of the exposed surface.
16. The device according to claim 15 , wherein the metal silicide is nickel silicide and the treated layer is Ni—Si—N.
17. The device according to claim 15 , further comprising a contact etch stop layer deposited over the treated layer.
18. The device according to claim 15 , wherein the metal silicide is selected from the group consisting of nickel silicide, cobalt silicide, titanium silicide, tantalum silicide, and tungsten silicide.
19. The device according to claim 15 , wherein the semiconductor device is a transistor.
20. The device according to claim 15 , wherein the metal silicide comprises nickel silicide, and the treated layer comprises Ni—Si—N formed by treating the exposed surface of the nickel silicide with NH 3 plasma, the treated layer hindering the formation of NiO on the exposed surface.