Molding material for ozone-resistant articles and ozone-resistant injection-molded articles
Highly ozone-resistant molding/shaped articles inclusive of piping materials and joints for use in semiconductor production lines, molding materials for ozone-resistant molding/shaped articles which are suited for the production of the molding/shaped articles, and ozone-resistant injection-molded articles and relevant injection-molding materials. Also disclosed is a molding material for ozone-resistant molding/shaped articles including a copolymer (A) and having a melt flow rate of 0.1–50 g/10 minute. The copolymer (A) is a copolymer including tetrafluoroethylene and a perfluorovinylether, and has not less than 3.5 mass % of a perfluorovinylether unit, a melting point of not less than 295° C., and not more than 50 of unstable terminal groups per 1×10 6 carbon atoms in the copolymer (A).
1. A molding material for ozone-resistant molding/shaped articles comprising a copolymer (A) and having a melt flow rate of 0.1–50 g/10 min.
wherein said copolymer (A) is a copolymer comprising tetrafluoroethylene and a perfluorovinylether with the total of tetrafluoroethylene and the perfluorovinylether units accounting for not less than 95 mol % of all the monomer units, and has not less than 3.5 mass of a perfluorovinylether unit, a melting point in the range of not less than 295° C. to not more than 310° C., and not more than 50 of unstable terminal groups per 1×10 6 carbon atoms in said copolymer (A).
2. The molding material for ozone-resistant molding/shaped articles according to claim 1
wherein the copolymer (A) is one obtained by subjecting a perfluoro-copolymer (a) to a fluorine gas treatment and
said perfluoro-copolymer (a) has not less than 60 of unstable terminal groups per 1×10 6 carbon atoms in said perfluoro-copolymer (a).
3. The molding material for ozone-resistant molding/shaped articles according to claim 1
wherein unstable terminal groups amount to not more than 20 per 1×10 6 carbon atoms in the copolymer (A).
4. The molding material for ozone-resistant molding/shaped articles according to claim 1
wherein unstable terminal groups amount to not more than 5 per 1×10 6 carbon atoms in the copolymer (A).
5. The molding material for ozone-resistant molding/shaped articles according to claim 1
wherein the copolymer (A) has an MIT value satisfying the following formula (1):
( MIT value)≧[7×10 6 ×(melt flow rate) −2 ] (1).
6. An ozone-resistant molding/shaped article for semiconductor production equipments
which is obtained by molding the molding material for ozone-resistant molding/shaped articles according to claim 1 .
7. The ozone-resistant molding/shaped article according to claim 6
which is a piping material for semiconductor production equipments or a joint for semiconductor production equipments.
8. A copolymer comprising tetrafluoroethylene and a perfluorovinylether,
wherein a perfluorovinylether unit accounts for not less than 3.5 mass % of the copolymer, the total of tetrafluoroethylene and perfluorovinylether units accounts for not less than 95 mol % of all the monomer units,
the number of unstable terminal groups is not more than 50 per 1×10 6 carbon atoms, and
a melting point ranges from not less than 295° C. to not more than 310° C.