Apparatus for controlled fracture substrate singulation
An apparatus and a system for separating dice from a substrate are described herein.
1. An apparatus for singulating dice from a substrate, comprising:
a flexible diaphragm defining a perimeter tab of a size adapted to extend beyond and around a perimeter edge of the substrate; and,
a pressure frame comprising a mounting flange in engagement with the perimeter tab, the pressure frame and the flexible diaphragm defining a cavity therebetween, the pressure frame further comprising a pressure port in fluid communication with the cavity adapted to communicate with a fluid pressure source.
2. The apparatus of claim 1 , wherein the flexible diaphragm comprises a material selected from the group consisting of flexible material, substantially inelastic cloth, substantially elastic cloth, and substantially elastic polymeric material.
3. The apparatus of claim 1 , wherein the pressure frame comprises a flat plate having an aperture therethrough, the mounting flange defined by the plate encircling the perimeter of the aperture.
4. The apparatus of claim 1 , the pressure frame further comprises a base plate, wherein the mounting flange extends a predetermined distance from the base plate, the mounting flange terminating in a rim, the rim in engagement with the perimeter tab.
5. The apparatus of claim 4 , further comprising a ring clamp, the ring clamp in urging engagement with the mounting flange with the perimeter tab therebetween.
6. The apparatus of claim 1 , further comprising a means of engaging the mounting flange to the perimeter tab, wherein the means is selected from the group consisting of a circular press, a perimeter clip, and adhesive.
7. An apparatus for singulating dice from a substrate, comprising:
a flexible diaphragm defining a first perimeter tab of a size adapted to extend beyond and around a perimeter edge of the substrate, the flexible diaphragm having a first surface and a second surface wherein the substrate is mounted on the first surface;
a flexible bladder defining a second perimeter tab, the second perimeter tab in engagement with the first perimeter tab, the flexible bladder positioned to contact the second surface of the flexible diaphragm upon application of a positive fluid pressure to the flexible bladder; and,
a pressure frame comprising a mounting flange in engagement with the second perimeter tab, the pressure frame and the flexible bladder defining a cavity therebetween, the pressure frame further comprising a pressure port in fluid communication with the cavity adapted to communicate with a fluid pressure source.
8. The apparatus of claim 7 , wherein the flexible diaphragm comprises a material selected from the group consisting of flexible material, substantially inelastic cloth, substantially elastic cloth, and substantially elastic polymeric material.
9. The apparatus of claim 7 , wherein the pressure frame comprises a flat plate having an aperture therethrough, the mounting flange defined by the plate encircling the perimeter of the aperture.
10. The apparatus of claim 7 , wherein the pressure frame further comprises a base plate, wherein the mounting flange extends a predetermined distance from the base plate, the mounting flange terminating in a rim, the rim in engagement with the second perimeter tab.
11. The apparatus of claim 10 , further comprising a ring clamp, the ring clamp in urging engagement with the mounting flange with the second perimeter tab therebetween.
12. The apparatus of claim 7 , further comprising a means of engaging the mounting flange to the second perimeter tab, wherein the means is selected from the group consisting of a circular press, a perimeter clip, and adhesive.
13. An apparatus for singulating dice from a substrate, comprising:
a flexible diaphragm defining a perimeter tab of a size adapted to extend beyond and around a perimeter edge of the substrate; and,
a plate in fluid tight engagement with the perimeter tab, the plate comprising a pressure port in fluid communication with a fluid pressure source, the plate and the flexible diaphragm defining a cavity therebetween upon application of a positive fluid pressure.
14. The apparatus of claim 13 , wherein the flexible diaphragm comprises a material selected from the group consisting of flexible material, substantially inelastic cloth, substantially elastic cloth, and substantially elastic polymeric material.
15. A system, comprising:
a substrate handling device; and
an apparatus for singulating dice from a substrate, comprising:
a flexible diaphragm defining a perimeter tab of a size adapted to extend beyond and around a perimeter edge of the substrate; and,
a pressure frame comprising a mounting flange in engagement with the perimeter tab, the pressure frame and the flexible diaphragm defining a cavity therebetween, the pressure frame further comprising a pressure port in fluid communication with the cavity adapted to communicate with a fluid pressure source.
16. The system of claim 15 , wherein the pressure frame comprises a flat plate having an aperture therethrough, the mounting flange defined by the plate encircling the perimeter of the aperture and wherein the pressure frame further comprises a base plate, wherein the mounting flange extends a predetermined distance from the base plate, the mounting flange terminating in a rim, the rim in engagement with the perimeter tab.