High density inductor and method for producing same
A method for producing a high density inductor includes the steps of forming a coil having a spiral shape, sealing the coil in the interior of a core member, and forming a terminal electrode for allowing electric conduction to said coil on the outside of said core member. In this method, the coil is formed by repeating a process of forming a wire layer by means of a thin film forming process and a process of forming an additional wire layer on top of the wire layer by means of the thin film forming process to pile up the wire layers. With this production method, it is possible to form a coil with a high aspect ratio. In addition, the inductor is designed in such a way that the core member envelopes only the coil. With that design, it is possible to make the inductor compact.
1. A high density inductor comprising:
a coil having a spiral shape; and
a core member disposed in such a way as to be located on a path of a magnetic line of force generated by said coil;
wherein said coil has a wire formed by piling up a base electrode layer and a plurality of plating layers in this order along a thickness direction of the wire, and the base electrode layer is formed by a thin film forming process and the plating layers are formed by a plating process.
2. A high density inductor according to claim 1 , wherein a ratio of the thickness of said coil to a width of said wire layers is equal to or more than 1.