IP Library › Granted Patent US 7,195,944
Granted Patent B2
US 7,195,944 · App. 11/032,853 · Granted Mar 27, 2007

Systems and methods for producing white-light emitting diodes

Assignee: Semileds Corporation
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Quick Facts
Patent No.
US 7,195,944
App. No.
11/032,853
Granted
Mar 27, 2007
Kind
B2
Abstract

A vertical light emitting diode (LED) includes a metal substrate; a p-electrode coupled to the metal substrate; a p-contact coupled to the p-electrode; a p-GaN portion coupled to the p electrode; an active region coupled to the p-GaN portion; an n-GaN portion coupled to the active region; and a phosphor layer coupled to the n-GaN.

Claims (24)

1. A method for fabricating a phosphor n-GaN up light-emitting diode (LED) wafer, comprising:

providing a carrier substrate;

depositing an n-GaN layer above the carrier substrate;

depositing active layers above the n-GaN portion;

depositing a p-GaN layer above the active layers;

depositing one or more metal layers;

applying a masking layer;

etching the metal, the p-GaN layer, the active layers, and the n-GaN layer;

removing the masking layer;

depositing a passivation layer;

removing a portion of the passivation layer on top of the p-GaN layer to expose the metal,

depositing one or more layers;

depositing a metal substrate;

removing the carrier substrate to expose the n-GaN surface; and

applying a phosphor layer above the n-GaN surface.

2. The method of claim 1 , wherein the phosphor n-GaN up LED wafer is substantially smooth and flat.

3. The method of claim 2 , wherein the phosphor n-GaN up LED wafer has a surface roughness less than 10000 angstrom before the phosphor layer is applied.

4. The method of claim 1 , wherein the carrier substrate is sapphire.

5. The method of claim 1 , wherein the metal substrate is deposited using one of: electro-chemical plating, electroless chemical plating, sputtering, chemical vapor deposition, e-beam evaporation, thermal spray.

6. The method of claim 1 , wherein the metal substrate is a metal or metal alloy comprising one of Copper, nickel, aluminum.

7. The method of claim 1 , wherein the carrier substrate is removed using one of: laser lift-off (LLO), wet etching, chemical mechanical polish.

8. The method of claim 1 , wherein the p-contact comprises a light reflector.

9. The method of claim 1 , comprising a bond pad coupled to the phosphor layer.

10. The method of claim 1 , wherein the phosphor layer applied at the wafer level is coupled to n-GaN surface of the n-side up vertical LED.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 30, 2017
From: SEMILEDS CORPORATION
To: LUMENS CO., LTD.
Reel/Frame 043985/0148 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 27, 2005
From: TRAN, ANH CHUONG; DOAN, TRUNG TRI
To: SEMILEDS CORPORATION
Reel/Frame 016939/0184 →
Continuity (1)
Related Publication 20060157721A1 · Jul 20, 2006