Metal-insulator-metal capacitor and interconnecting structure
A method of manufacturing a MIM capacitor and a interconnecting structure using a damascene process. The MIM capacitor and the first interconnecting structure can be formed at equal depths.
1. A method of manufacturing a metal-insulator-metal capacitor device, comprising:
forming an at least one lower insulating layer on a lower metal interconnecting layer;
forming a first trench in the at least one lower insulating layer, exposing the lower metal interconnecting layer;
sequentially depositing a lower barrier metal layer, a capacitor dielectric film, and the upper barrier metal layer in the first trench and over the at least one lower insulating layer;
forming a first conductive film on the upper barrier layer;
planarizing the first conductive film to the at least one lower insulating layer;
forming a first via and a second trench in the at least one lower insulating layer, thereby exposing the lower metal interconnecting layer;
forming a second conductive film, filling the first via and the second trench; and
planarizing the second conductive film to the at least one lower insulating layer;
wherein said method further comprises, after planarizing the second conductive film;
forming an at least one upper insulating layer on the at least one lower insulating layer;
forming a second via in the at least one upper insulating layer, exposing the first conductive film; and
forming a third via in the at least one insulating layer, exposing the second conductive film, wherein the second via and the third via have substantially the same depths.
2. The method of claim 1 further comprising, prior to forming the second conductive film, forming a metal barrier layer in the first via and the second trench.
3. The method of claim 1 , wherein the forming the at least one lower insulating layer on the lower metal interconnecting layer comprises:
forming a first etch stopper on the lower metal interconnecting layer;
forming a first insulating film on the first etch stopper;
forming a second etch stopper on the first insulating film;
forming a second insulating film on the second etch stopper; and
forming a buffer insulating film on the second insulating film.
4. The method of claim 3 , wherein:
the etch stopper is formed of a material selected from the group consisting of SiC, SiN, SiCN, and SiCO; and
the buffer insulating film is formed of a material selected from the group consisting of Fluorine-doped Silicate Glass and Undoped Silicate Glass.
5. The method of claim 1 further comprising, prior to forming the first via and the second trench, forming an etch stopper on the planarized first conductive film and the at least one insulating layer.
6. The method of claim 1 , wherein the first trench is part of a mesh pattern on the layout of a mask.
7. The method of claim 1 , wherein the second trench is formed after the first via is formed.
8. The method of claim 1 , wherein the first via is formed after the second trench is formed.
9. The method of claim 1 , wherein the capacitor dielectric film is formed using one of atomic layer deposition and chemical vapor deposition.
10. The method of claim 1 , wherein the capacitor dielectric film is formed of a film selected from a group consisting of a SiO 2 film, a Si 3 N 4 film, a Ta 2 O 5 film, a TiO 2 film, and an Al 2 O 3 film.
11. The method of claim 1 , wherein the lower metal interconnecting layer, the first conductive film, and the second conductive film are formed of copper.
12. The method of claim 1 , wherein the lower metal interconnecting layer, the first conductive film, and the second conductive film are formed of a material selected from a group consisting of Al, Au, Ag, Ti, Ta, W and an alloy including at least one of Al, Au, Ag, Ti, Ta, and W.
13. The method of claim 1 , wherein the lower barrier metal layer and the upper barrier metal layer are formed of a layer selected from a group consisting of a Ta layer, a TaN layer, a WN layer, and a layer with a Ta layer/TaN layer structure.
14. A method of manufacturing a metal-insulator-metal capacitor, comprising:
forming at least one lower insulating layer on a lower metal interconnecting layer;
forming a first trench and a first via in the at least one lower insulating layer, exposing the lower metal interconnecting layer, wherein the first via and the first trench have substantially the same depth;
filling the first trench and the first via with an insulating material;
selectively removing the insulating material from the first trench;
forming a lower metal barrier layer and a capacitor dielectric film in the first trench and over the at least one lower insulating layer;
forming a second trench in the at least one lower insulating layer overlapping to the first via;
removing the insulating material in the first via;
forming an upper metal barrier layer over the at least one lower insulating layer on the capacitor dielectric film, in the first via, and the second trench;
forming a conductive film on the upper metal barrier layer, filling the first via, the second trench for metal interconnecting, and the first trench; and
planarizing the conductive film to the at least one lower insulating layer.
15. The method of claim 14 further comprising, after planarizing the conductive film:
forming at least one upper insulating layer on the at least one lower insulating layer;
forming a second via in the at least one upper insulating layer, over the first trench, exposing the conductive film; and
forming a third via in the at least one upper insulating layer, over the second trench, exposing the conductive film, wherein the second via and the third via have substantially equal depths.
16. The method of claim 14 , wherein the action for forming the lower insulating layer comprises:
forming a first etch stopper on the lower metal interconnecting layer;
forming a first insulating film on the first etch stopper;
forming a second etch stopper on the first insulating film;
forming a second insulating film on the second etch stopper; and
forming a buffer insulating film on the second insulating film.
17. The method of claim 16 , wherein:
the etch stopper is formed of a material selected from the group consisting of SiC, SiN, SiCN, and SiCO; and
the buffer insulating film is formed of a material selected from the group consisting of Flourine-doped Silicate Glass and Undoped Silicate Glass.
18. The method of claim 14 , wherein the first trench is part of a mesh pattern on the layout of a mask.
19. The method of claim 14 , wherein the insulating material that fills the first trench and the first via is Spin-On-Glass.
20. The method of claim 14 , wherein the capacitor dielectric film is formed in the first trench using one of atomic layer deposition and chemical vapor deposition.
21. The method of claim 14 , wherein the capacitor dielectric film is formed of a film selected from a group consisting of an SiO 2 film, an Si 3 N 4 film, a Ta 2 O 5 film, a TiO 2 film, and an Al 2 O 3 film.
22. The method of claim 14 , wherein the lower metal interconnecting layer and the conductive film are copper.
23. The method of claim 14 , wherein the lower metal interconnecting layer and the conductive film are formed of a material selected from a group consisting of Al, Au, Ag, Ti, Ta, W and an alloy including at least one of Al, Au, Ag, Ti, Ta, and W.
24. The method of claim 14 , wherein the lower barrier metal layer and the upper barrier metal layer are formed of a layer selected from a group consisting of a Ta layer, a TaN layer, a WN layer, and a layer with a Ta layer/TaN layer structure.